51. A Method to Fabricate Biaxially Textured MgO Buffer Layer for HTS Coated Conductor
- Author
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Shaozhu Xiao, Zhenghe Han, Feng Feng, Hongyuan Lu, Timing Qu, and Xiangsong Zhang
- Subjects
Materials science ,02 engineering and technology ,Substrate (electronics) ,Sputter deposition ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,01 natural sciences ,Ion source ,Electronic, Optical and Magnetic Materials ,Amorphous solid ,0103 physical sciences ,Deposition (phase transition) ,Texture (crystalline) ,Electrical and Electronic Engineering ,Composite material ,010306 general physics ,0210 nano-technology ,Ion beam-assisted deposition ,Layer (electronics) - Abstract
In this paper, a radio-frequency magnetron sputtering system without any assisting ion source was employed to fabricate biaxially textured MgO films on the substrates of amorphous Y 2 O 3 /Al 2 O 3 /Hastelloy stacks. During the deposition process, the growing MgO film was bombarded by an off-normal energetic particle flux mainly composed of oxygen atoms and negative oxygen ions, which originated from the target surface. MgO obtained a biaxial texture due to such bombardment; thus, this method is named energetic particle self-assist deposition (EPSAD). The texture of EPSAD-MgO films was evaluated via the X-ray diffraction measurement of the postdeposited homoepitaxial MgO layers. An out-of-plane orientation of MgO(111) and a three-fold symmetric in-plane alignment were observed. The MgO texture was optimal when the EPSAD-MgO thickness was about 10 nm. The formation of biaxial texture during the EPSAD process was verified by a control study, and the influences of targetinclined angle and target-substrate distance were also investigated. Furthermore, the mechanism of the EPSAD-MgO method was compared with those of the inclined substrate deposition and ion beam assisted deposition. This study proposed a new method to fabricate a biaxially textured MgO buffer layer for high temperature superconducting (HTS) coated conductors. More optimization research will be conducted in our future study.
- Published
- 2016