51. Wake-up effect in Hf0.4Zr0.6O2 ferroelectric thin-film capacitors under a cycling electric field.
- Author
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Li, Yilin, Zhu, Hui, Li, Rui, Liu, Jie, Xiang, Jinjuan, Xie, Na, Huang, Zeng, Fang, Zhixuan, Liu, Xing, and Zhou, Lixing
- Subjects
FERROELECTRIC capacitors ,ELECTRIC fields ,FERROELECTRICITY ,SPACE charge - Abstract
We examined the wake-up effect in a TiN/Hf
0.4 Zr0.6 O2 /TiN structure. The increased polarization was affected by the cumulative duration of a switched electric field and the single application time of the field during each switching cycle. The space-charge-limited current was stable, indicating that the trap density did not change during the wake-up. The effective charge density in the space-charge region was extracted from capacitanceâ€"voltage curves, which demonstrated an increase in free charges at the interface. Based on changing characteristics in these properties, the wake-up effect can be attributed to the redistribution of oxygen vacancies under the electric field. [ABSTRACT FROM AUTHOR]- Published
- 2022
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