51. Performance improvement of amorphous Ga2O3 ultraviolet photodetector by annealing under oxygen atmosphere
- Author
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Xing Chen, Lei Liu, Jialin Yang, Jiaheng Feng, Kewei Liu, Yang Xia, Changqi Zhou, Zhenzhong Zhang, and Dezhen Shen
- Subjects
Fabrication ,Materials science ,business.industry ,Annealing (metallurgy) ,Mechanical Engineering ,Metals and Alloys ,Photodetector ,02 engineering and technology ,010402 general chemistry ,021001 nanoscience & nanotechnology ,medicine.disease_cause ,01 natural sciences ,0104 chemical sciences ,Amorphous solid ,Atomic layer deposition ,Mechanics of Materials ,Materials Chemistry ,medicine ,Optoelectronics ,0210 nano-technology ,business ,Ultraviolet ,Visible spectrum ,Dark current - Abstract
We have demonstrated the fast-speed and high-rejection-ratio solar-blind ultraviolet (UV) photodetectors based on amorphous Ga2O3 (a-Ga2O3) films grown by atomic layer deposition. The effect of the annealing under oxygen atmosphere on the performance of a-Ga2O3 photodetectors is investigated. By the oxygen annealing at 500 °C, the 90-10% decay time of a-Ga2O3 photodetector can be decreased to ∼150 ns, and the UV/Visible rejection ratio of the photodetector can reach as high as 2.74×105, due to the significant suppression of the visible light response. Moreover, the dark current of the 500 °C-annealed photodetector is only 9.43 pA at 10 V bias. These phenomena can be explained by the decrease in oxygen vacancy concentration of the a-Ga2O3 films after the oxygen annealing. The combination of high rejection ratios and fast operating speeds offers a viable way for facile and scalable fabrication of the oxide semiconductor solar-blind UV detectors.
- Published
- 2020
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