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We have developed a real-time dose monitoring system for a low-energy ion-beam facility. Before we developed the monitoring system, the system had given a substantial error of ±23% when we irradiated an ion beam with a dose as much as 3.0 × 1016 cm−2 on the Si substrate. Moreover, a low irradiation dose as small as 1013 cm−2 was scarcely able to be controlled because of a too short irradiation time of several seconds, producing a greater dose error. To develop a real-time dose monitoring system, in this work, we employed a current integrator in conjunction with a beam stopper, by which a dose of 3.0 ×1016 cm−2 can be exactly irradiated on the sample with less than ±6% error, which was ensured by the measurements of Rutherford backscattering spectroscopy.

The circuit structure and the experimental performance of a newly integrated multichannel charge-sensitive preamplifier for silicon or germanium detectors are shown. The circuit has been conceived and optimized for the silicon detector GAL-TRACE, employed for light and heavy ion spectroscopy in nuclear physics experiments. The chip includes four channels optimized for anodic signals and one channel specifically designed for cathodic signals. An I2C interface is used to adjust, as needed, a host of key parameters of the preamplifier, such as sensitivity and bandwidth. An integrated range booster yields an exceptional dynamic range of 103 dB for the cathodic channel. The circuit features a low power consumption of 11 mW per channel, a fast rise time of the order of 10 ns, and low noise. Thanks to an accurate design of the input stage, the equivalent noise charge, measured with a commercial shaping amplifier, is as low as 130 rms electrons at a shaping time of 6 $\mu \text{s}$ with 5 pF of detector capacitance. The bandwidth of the preampifier is adequate for pulse shape analysis techniques used for particle discrimination.

The article presents the results of the development of a system for measuring emittance characteristics of ion sources studied at the IAP NAS of Ukraine with the aim of obtaining the ion beams with a high brightness. The emittance measurement system is based on the scheme of an electrostatic scanner and consists of two main parts: the scanner, which moves in the direction perpendicular to the beam axis using a stepper motor, and the electronic system of control, processing and data acquisition. The electronic system contains a Raspberry pi 3B microcomputer, precision DAC/ADCs, the high-voltage amplifier of a scanning voltage up to ±500 V on deflection plates of the scanner and a wide range current integrator. The determination of the emittance consists in measuring the ion beam intensity distribution when the scanner moves along the x-coordinate and the electrostatic scanning along the x´ angle. The obtained two-dimensional data array allows determining the main characteristics of ion beam: geometric 90% emittance, the root mean square (rms) emittance, the Twiss parameters and phase ellipse of rms emittance, the beam current profile and the angle current density distribution. To test the performance and functionality of the system, the emittance characteristics of the penning type ion source were measured. The working gas was helium, and the beam energy varied within 7–15 keV. At 13 keV of beam energy the following emittances of the He+ ions beam was obtained: 90% emittance is 30 π∙mm∙mrad, rms emittance is 8.4 mm∙mrad, and the normalized rms emittance is equal to 0.022 mm∙mrad. The developed system for measuring the emittance of the ion beams is characterized by a short measurement time of 10-15 minutes.

In this study, we examine the feasibility of designing a MEMS microphone employing a levitation based electrode configuration. This electrode scheme enables capacitive MEMS sensors that could work for large bias voltages without pull-in failure. Our experiments and simulations indicate that it is possible to create robust sensors properly working at high DC voltages, which is not feasible for most of the conventional parallel plate electrode-based-microscale devices. In addition, the use of larger bias voltages will improve signal-to-noise ratios in MEMS sensors because it increases the signal relative to the noise in read-out circuits. This study presents the design, fabrication, and testing of a capacitive microphone, which is made of approximately 2 μm thick highly-doped polysilicon as a diaphragm. It has approximately 1 mm 2 surface area and incorporates interdigitated sensing electrodes on three of its sides. Right underneath these moving electrodes, there are fixed fingers being held at the same voltage potential as the moving electrodes and separated from them with a 2 μm thick air gap. The electronic output is obtained using a charge amplifier. Measured results obtained on three different microphone chips using bias voltages up to 200 volts indicate that pull-in failure is completely avoided. The sensitivity of this initial design was measured to be 16.1 mV/Pa at 200 V bias voltage, and the bandwidth was from 100 Hz to 4.9 kHz.

A low-power ultrasonic communication system conceived for cargo container monitoring is presented. Two piezoelectric transducers operating at 40 kHz are used for generating and acquiring an ultrasonic signal through the metallic wall, thus establishing a non-invasive inside-outside communication that preserves the container integrity. Both transducers are fixed by means of a novel magnetic case designed for optimizing data transmission. The acoustic and electrical characteristics of the ultrasonic channel are analyzed. An experimental measurement setup based on FPGA has been implemented for comparing some basic modulation and detection schemes in terms of Bit Error Rate (BER), also considering their robustness against undesired mechanical and electromagnetic perturbations. On this basis, a compact digital DBPSK modulator using a square carrier signal is proposed. Frequency and amplitude tracking algorithms are designed for optimizing the quality and robustness of the data transmission. Finally, a low-power low-rate (up to few kbps) architecture based on the previous elements is presented. All the proposed contributions are experimentally validated. This work was supported in part by Spanish Agencia Estatal de Investigación and Fondo Europeo de Desarrollo Regional under Grant TEC2016-80396-C2-1-R, and in part by the Obra Social La Caixa, Fundación Caja Navarra (Convocatoria 2018 de Captación de Talento).

The charge amplifier is an important building block in various electronic circuits. In this paper a new charge amplifier for piezoelectric sensors is introduced. The advantages of the new proposed charge amplifier becomes obvious in the quasi-static applications. In some quasi-static applications the traditional charge amplifiers uses an extremely large feedback resistor (in the range of $\text{G}\Omega $ ) whereas the proposed charge amplifier no longer requires such extremely large resistors. Moreover the proposed circuit reduces the output offset voltage significantly in comparison with conventional charge amplifier. The proposed circuit can be also implemented by using general purpose JFET operational amplifiers instead of using electrometer operational amplifiers therefore the cost of implementation will be reduced significantly in comparison with conventional charge amplifier. The proposed charge amplifier was assembled by using general purpose JFET Op-Amp to capture and amplify the output voltage of the piezoelectric vibration sensor Minisense100. In this experiment the low-cutoff frequency and the gain of the proposed charge amplifier were set equal to 0.2Hz and 20.5 dB respectively. The output offset voltage of the circuit was measured equal to 210 $\mu \text{V}$ .The measurement of very small vibration (±0.015g) showed a relative error equal to 2.1% with respect to the value which is obtained by using vibration meter as reference.

We present the fabrication and characterization of an array of microbridge-structured magnetoelectric (ME) thin film sensors which are constructed by an ME composite consisting of a 1 $\mu \text{m}$ PZT film and a 1 $\mu \text{m}$ amorphous FeCoSiB film deposited on a partially thinned Si substrate. Characterization of the sensor showed a large ME coefficient of $16.87~\text {V/cm}\cdot \text {Oe}$ in resonance at 7.9 kHz without a charge amplifier. The sensitivity was enhanced by 1.65 times when three identical sensors were connected in series. The resonant frequency of the sensor was precisely regulated by adjusting the etched area of the substrate, and the 3 dB bandwidth of the resonant frequency was doubled after two adjusted sensors were connected in parallel.

This paper presents the updates implemented by the Vibration Laboratory of INMETRO on the electrical calibration of charge conditioning amplifiers. We can now carry out both standard classical calibrations with fixed in-series capacitors and including an adjustable parallel capacitance to match the total capacitance of a given pair of accelerometer plus cable. The calibration system and some analysis of measurement results are presented.

Parameters such as capacitance and conductivity are measured to describe the properties of a medium, including its moisture content. These methods do not deliver highly accurate results in materials that are characterized by low homogeneity, varied porosity, high conductivity and high water content. This study proposes a more accurate method for estimating the parameters of any medium. In the experimental setup, a charge amplifier and a phase-sensitive voltmeter were applied to determine resistance and capacitance parameters of a medium based on the signals received by the measuring system. The proposed method can be applied to non-homogeneous media containing both dielectric and conductive materials. The described measuring system is composed of two flat electrodes whose size can be adapted to the dimensions of the analyzed medium. A method for processing the sensing signal to determine the impedance characteristics of a medium with the use of a phase-sensitive voltmeter was described. The measuring system was modeled in Matlab/Simulink, and the results were discussed.

The piezoelectric sensors are the main electronic devices widely used to measure the instantaneous force that is exerted on the sensor surface by vehicle wheels moving at normal speed. This application is typically implemented in High Speed Weigh in Motion system, which has been until today under research studies. The system aims to perform an accurate and reliable axle load measurement of heavy trucks in motion. The piezoelectric sensor produces a voltage when a strain is applied on its surface. In general, the voltage signal is in a pulse form as a deterministic signal, easy to operate, but often it is not so. This problem is due to more signal noise, for the most part, because of either the modest quality of piezoelectric sensor or the inefficiency of sensor signal conditioning stage design. The present paper introduces a newly readout system allowing the processing of the piezoelectric sensor output signal in response of exerted force. The studied system consists on the charge amplifier, which is coupled with a transistor used in decoupled common emitter. This circuitry scheme cancels noise and random effect on sensor signal. The purpose of the present study focuses on the achievement of a reliable and deterministic signal, using a sensor with modest quality. The experiment results show the efficiency of the proposed readout system. Even though more noises affect the piezoelectric sensor output signal, the proposed electric interface provides a deterministic and suitable analog signal offering more possibilities to process with the standard tools of signal processing.

In-line measurement of the mass flow rate of solids in pneumatic conveying pipelines is essential for the efficient and optimized operation of many industrial processes. This paper presents a comparative study of using induced and transferred charges from non-intrusive electrodes exposed to the particle flow for mass flow rate measurement. A novel signal conditioning circuit, which consists of a current sense amplifier and a charge amplifier, is designed to convert the induced and transferred charges into two separate voltage signals. Empirical measurement models that relate the particle velocity, the root-mean-square (r.m.s) magnitude of the induced charge signal and the slope of the transferred charge signal to the mass flow rate are proposed. Experiments were undertaken using electrodes of different widths and under different mass flow rate and particle velocity conditions. Results obtained show that both the r.m.s magnitude of the induced charge signal and the slope of the transferred charge signal increase with the mass flow rate and the velocity of particles. In general, the measurement results using the induced and transferred charges from either the narrow or the wide electrode are similar. However, the method based on the transferred charge is less reliable due to confined sensing area and electrode charging by particles adhered to the electrode surface.

In this paper, a low noise and low power analog front end for piezoelectric microphones used in hearing aid devices is presented. It consists of a Charge Amplifier, followed by a Variable Gain Amplifier and an Analog-to-Digital Converter. At the core of charge amplifier a two stage opamp with modified cascode current mirror is designed which achieves a gain of 93 dB and phase margin of 62°. Designed analog front end achieves an input referred noise of 0.12 μVrms and SNR of 74 dB. It consumes power of 430 μW from 1.8 V supply and occupies an area of 1.2 mm × 0.22 mm. Proposed circuit is designed and fabricated in 0.18 μm CMOS process. Designed circuit is interfaced with a sensor model of piezoelectric microphone, which mimics Ormia ochracea's auditory system, and its performance is successfully verified against simulation results.

A charge amplifier with noise peaking suppression and gain drop compensation is proposed. By utilizing the proposed Quasi-Miller RC network, the noise peaking is suppressed and gain drop is compensated, which alleviates the design trade-off between charge gain and output root-mean-square (RMS) noise, therefore obtains an improved sensitivity. Meanwhile, the Quasi-Miller RC network permits the charge amplifier to support ultra-low frequency operation without using a huge resistor, which is normally required by the charge amplifier. The fabricated charge amplifier demonstrates an input-referred RMS noise charge of 909 aC, a charge gain of 10.2 V/pC and a 3-dB bandwidth from 80 Hz to 38 MHz. Low noise and high charge gain are obtained simultaneously. Meanwhile, extremely low cut-off frequency is also obtained, which is beneficial to maintain the signal integrity.

Home-based health care applications are rapidly gaining popularity, enabling a renewed focus on the design of low-power and low-noise front-end circuitry. In this context, the evaluation of low-frequency biomedical signals, such as the respiration pattern, benefits from the design of a front-end amplifier with reduced power consumption and low noise. Continuous efforts on improving the performances of respiration-monitoring devices have resulted in the reduction of noise and motion artefacts by increasing complexity (e.g. complex algorithms or high precision filtering) at the expense of increased power consumption. This study is focused on the design of a fully integrated charge amplifier for respiration monitoring based on a pyroelectric sensor. Simulation and test results show a power consumption of 1.8 µW, an active die area of 0.085 mm 2 , a bandwidth in the range from 10 mHz to 13 kHz, and a remarkable noise efficiency factor of ∼2.79, which fits well with the development of an energy efficient wearable device.

The results and methodology of the experiment on the definition of impulse pressure, created by a generator of a plasma-impulse impact in oil, are described. Excessive impulse pressure was measured at a given distance from the axis of the generator in various samples of oil differing in their physical-chemical characteristics.

This paper presents a sub-baud-rate clock and data recovery (CDR) circuit that can recover clock and data using only differential quarter-rate clocks. A combination of eight samplers and an integrator recover four data bits in each clock cycle. Four of the eight samplers are re-used for phase detection as well as for background calibration to improve the robustness of the CDR to process, voltage, and temperature variations. A continuous-time linear equalizer is used to compensate for inter-symbol interference up to 11 dB. The CDR prototype fabricated in a 65-nm CMOS recovers 15.2-Gb/s data using only differential 3.8-GHz clock and achieves bit error rate (BER) 10-MHz jitter tolerance (JTOL) corner, and 548 fsrms recovered clock jitter. The total power consumption is 29 mW, which translates to an energy efficiency of 1.9 pJ/bit.

This paper presents a differential-input, differen tial-output charge amplifier topology built with discrete, commercial components. The amplifier is designed to interface high-impedance ultrasonic sensors made of piezoelectric polymer, with a required bandpass of at least 100 kHz to 1 MHz, and needs to operate from a single 5-V supply. The performance and tradeoffs of the proposed topology are evaluated analytically and using a circuit simulator, showing a charge-to-voltage conversion gain in excess of 240 dB[V/C], while maintaining an input impedance lower than 100 $\Omega$ . Simulations and measurements of a prototype implementation are presented.

A lossy integrator with active bias point

This paper presents a motion-sensing device with the capability of harvesting energy from low-frequency motion activities that can be utilized for long-term human health monitoring. The energy harvester used in the proposed motion sensor is based on the mechanical modulation of liquid on an insulated electrode, which utilizes a technique referred to as reverse electrowetting-on-dielectric (REWOD). The generated AC signal from the REWOD is rectified to a DC voltage using a Schottky diode-based rectifier and boosted subsequently with the help of a linear charge-pump circuit and a low-dropout regulator (LDO). The constant DC voltage from the LDO (1.8 V) powers the motion-sensing read-out circuitry, which converts the generated charge into a proportional output voltage using a charge amplifier. After amplification of the motion data, a 5-bit SAR-ADC (successive-approximation register ADC) digitizes the signal to be transmitted to a remote receiver. Both the CMOS energy harvester circuit including the rectifier, the charge-pump circuit, the LDO, and the read-out circuit including the charge amplifier, and the ADC is designed in the standard 180 nm CMOS technology. The amplified amplitude goes up to 1.76 V at 10 Hz motion frequency, following linearity with respect to the frequency. The generated DC voltage from the REWOD after the rectifier and the charge-pump is found to be 2.4 V, having the voltage conversion ratio (VCR) as 32.65% at 10 Hz of motion frequency. The power conversion efficiency (PCE) of the rectifier is simulated as high as 68.57% at 10 Hz. The LDO provides the power supply voltage of 1.8 V to the read-out circuit. The energy harvester demonstrates a linear relationship between the frequency of motion and the generated output power, making it suitable as a self-powered wearable motion sensor.

Charge amplifiers, characterized by their charge-sensitivity or charge gain, are essential components of a transducer-interfacing system that amplify charge signals emerging from various sensors and convert them into voltage signals. Today, with increased scaling of MOSFETs, it becomes challenging to obtain the charge amplifiers with high charge sensitivity and low power. Furthermore, if the charge amplifier is to be operated at lower bandwidth, then obtaining low noise at higher charge sensitivity is also difficult. In this paper, the authors propose a novel design of a charge-sensitive preamplifier in 90 nm CMOS technology that can be operated at the frequency range of 10 Hz-10 kHz, suitable for biosignals at lower frequencies. The opamp in the preamplifier is designed to have a folded-cascode structure with composite cascoding at its input transistors for low power operation. A feedback resistance of 185.20 GΩ for the preamplifier is actively realized using long-channel cascode MOSFET stage in the opamp, thereby eliminating the need for a large value of passive resistance on-chip. The preamplifier has a high charge sensitivity of 8.875 mV/fC at a low power consumption of 214.32 nW with input-referred noise of 256.89 μV for the bandwidth 10 Hz-10 kHz. The preamplifier operation is verified by interfacing the model of the preamplifier with the small-signal equivalent of a SPICE model of a Silicon Nanowire Field-effect Transistor (SiNW-FET) based biosensor which was proposed for impedimetric sensing of biomolecules.

Monitoring human health in real-time using wearable and implantable electronics (WIE) has become one of the most promising and rapidly growing technologies in the healthcare industry. In general, these electronics are powered by batteries that require periodic replacement and maintenance over their lifetime. To prolong the operation of these electronics, they should have zero post-installation maintenance. On this front, various energy harvesting technologies to generate electrical energy from ambient energy sources have been researched. Many energy harvesters currently available are limited by their power output and energy densities. With the miniaturization of wearable and implantable electronics, the size of the harvesters must be miniaturized accordingly in order to increase the energy density of the harvesters. Additionally, many of the energy harvesters also suffer from limited operational parameters such as resonance frequency and variable input signals. In this work, low frequency motion energy harvesting based on reverse electrowetting-ondielectric (REWOD) is examined using perforated high surface area electrodes with 38 µm pore diameters. Total available surface area per planar area was 8.36 cm2 showing a significant surface area enhancement from planar to porous electrodes and proportional increase in AC voltage density from our previous work. In REWOD energy harvesting, high surface area electrodes significantly increase the capacitance and hence the power density. An AC peak-to-peak voltage generation from the electrode in the range from 1.57-3.32 V for the given frequency range of 1-5 Hz with 0.5 Hz step is demonstrated. In addition, the unconditioned power generated from the harvester is converted to a DC power using a commercial off-theshelf Schottky diode-based voltage multiplier and low dropout regulator (LDO) such that the sensors that use this technology could be fully self-powered. The produced charge is then converted to a proportional voltage by using a commercial charge amplifier to record the features of the motion activities. A transceiver radio is also used to transmit the digitized data from the amplifier and the built-in analog-to-digital converter (ADC) in the micro-controller. This paper proposes the energy harvester acting as a self-powered motion sensor for different physical activities for wearable and wireless healthcare devices.

In this paper, a novel piezoelectric sensor is presented for patient's breath monitoring applications. Breath rate monitoring is important especially for the new coronavirus patients. In this work, a piezoelectric sensor is designed in the form of a vertex-attached triangular beam made of Polyvinylidene fluoride (PVDF) and Polydimethylsiloxane (PDMS). It exploits chest displacement to distinguish breathing vibrations. The device shape and dimensions have been designed for low frequency operation. The output respiration signal is amplified using a low power charge amplifier circuit. The sensor can be placed in a vest and fastened as a belt, or be attached to the chest by a tape. A low pass filter is used to eliminate the noise from the environment and body movement. Among the most important features are high accuracy, low resonance frequency to distinguish chest movement, low weight, low cost, portability, and reliability. Simulation of the designed sensor using COMSOL shows output voltage of 1 V at breathing frequency of 0.2 Hz.

This paper presents a reverse electrowetting-on-dielectric (REWOD) energy harvester integrated with rectifier, boost converter, and charge amplifier that is, without bias voltage, capable of powering wearable sensors for monitoring human health in real-time. REWOD has been demonstrated to effectively generate electrical current at a low frequency range (< 3 Hz), which is the frequency range for various human activities such as walking, running, etc. However, the current generated from the REWOD without external bias source is insufficient to power such motion sensors. In this work, to eventually implement a fully self-powered motion sensor, we demonstrate a novel bias-free REWOD AC generation and then rectify, boost, and amplify the signal using commercial components. The unconditioned REWOD output of 95–240 mV AC is generated using a 50 μL droplet of 0.5M NaCl electrolyte and 2.5 mm of electrode displacement from an oscillation frequency range of 1–3 Hz. A seven-stage rectifier using Schottky diodes having a forward voltage drop of 135–240 mV and a forward current of 1 mA converts the generated AC signal to DC voltage. ∼3 V DC is measured at the boost converter output, proving the system could function as a self-powered motion sensor. Additionally, a linear relationship of output DC voltage with respect to frequency and displacement demonstrates the potential of this REWOD energy harvester to function as a self-powered wearable motion sensor.

This paper presents an inverter-based operational transconductance amplifier (OTA) which obtains high loop gain by correlated level shifting (CLS) technique with ping-pong operation. Thanks to the shifting capacitor providing voltage step between the OTA output and the inverter output, the suppressed inverter output swing helps OTA to achieve higher DC gain yielding better accuracy in the application of charge amplifier or integrator. The proposed technique utilizes two identical sub-OTA structures working in the ping-pong way to provide level shifting reference voltage for each other. This operation allows inverter-based OTA to work at the amplification mode in both clock phases, thus double sampling technique can be adopted to achieve twice of the charge transfer efficiency. Compared with the conventional inverter-based charge amplifier, the proposed topology improves DC gain from 39dB to 71dB at the cost of 17% power consumption increase from 7.1µA to 8.6µA.

In this work, a piezoelectric MEMS based vibration sensor with a unique gimbal shaped guard ring in differential electrical configuration has been designed for enhanced acceleration sensitivity in out-of-plane direction and reduced in-plane crosstalk. The Thin-film Piezo on Silicon (TPoS) accelerometer was fabricated using a GlobalMEMS Inc. PZT platform. This method makes use of the excellent piezoelectric property of the Lead Zirconate Titanate (PZT) thin-film along with low crystal defect property of single crystal silicon, thus ensuring a good combination of sensitivity, resolution, bandwidth, reliability, and lifetime. A system-level approach was adopted to integrate the MEMS device with a charge amplifier and a microcontroller. The device performance was compared with the standard reference accelerometer for 1-g load. The developed MEMS sensor module was further implemented for surface roughness prediction in a quartz polishing system using machine learning algorithm incorporating both the acceleration-time data and the feed rate of the polishing spindle.

We describe a common-mode feedback circuit (CMFB) for a charge detector. The amplifier is implemented in a 180-nm complementary metal-oxide-semiconductor (CMOS) process. The amplifier combines a folded differential topology, active reset, and small feedback capacitors. This allows for low noise, high-gain, high-dynamic-range, and robust operations. The design and analysis of the CMFB for the proposed high-gain charge amplifier is discussed. Simulation results show that the CMFB loop has a phase margin of 62.1 degrees and a gain margin of 25 dB. Measurement results show the amplifier chip exhibits a stable common mode voltage.

This paper presents a self-powered motion sensor based on reverse-electrowetting on dielectric (REWOD) energy harvesting having the capability of remotely keeping a track of any motion activity. The energy harvester includes a rectifier and a voltage regulator to provide the DC supply voltage to the analog front-end and the transmitter to wirelessly transfer the data from the motion sensor. The on-chip circuitry includes a seven-stage voltage-doubler based rectifier, an amplifier, an analog-to-digital converter (ADC), and a transmitter, and is designed in standard 180 nm CMOS process with a supply voltage of 1.8 V. The recycled folded cascode (RFC) based charge amplifier has a closed-loop gain of 53 dB within the bandwidth of 1–150 Hz, which is suitable to detect any low-frequency motion signal. An 8-bit SAR-ADC is designed to digitize the amplified signal with a sampling rate of 1 ksamples/s. The transmitter used for this application operates in the 3.1–5 GHz frequency band with an energy efficiency of 8.5 pJ/pulse at 100 kbps data rate. The wireless motion sensing device with the REWOD can be suitable for quantitatively monitoring the motion-related data as a wearable sensor.

A detector connected to a charge amplifier adds parasitic input capacitance that alters the amplifier's gain. The detector capacitance therefore must be characterized so as to properly account for its effect. This paper presents a novel, compact technique to measure the detector capacitance by exploiting the circuit elements within the charge amplifier itself. Reconfiguring the charge amplifier with programmable switches, a capacitor divider network emerges to measure the detector capacitance without the need for any accurate timing references and complex controls. Experimental results of the proposed charge amplifier fabricated in a 180-nm CMOS technology demonstrate the ability to measure the detector capacitance to within 3% of its actual value. An actual charge measurement is also presented.

The paper theoretically determines the dependence of the electrically excited noise, damped oscillations piezoelectric sensor, integrated with SWCNT (single-wall carbon nanotube) needle and charge amplifier, from defects of an SWCNT graphene sheet and sensor malfunctions generally, for AFM (atomic force microscopy) with high-resolution. Also is the proposed method for estimating the piezoelectric sensor state, integrated with the SWCNT needle and charge amplifier when evaluating “SWCNT needle-surface” contact in real-time scanning AFM. Many micro-machining techniques have been employed to fabricate signal oscillations piezoelectric sensors and piezoelectric nanoactuators. The properties of SWCNT, for example, high strength, many times greater than the strength of steel, makes them suitable elements for use as needles probe microscopy. This paper presents both experimental and analytical data to show the critical characteristics of a piezoelectric sensor, integrated with SWCNT needle contact in the real-time scanning AFM.