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51. Ultra-Thin Deformable Silicon Substrates with Lateral Segmentation and Flexible Metal Interconnect

52. Flexible architecture for microinstrumentation systems in silicon

53. A local bus for MCM-based microinstrumentation systems

54. A low-power low-voltage digital bus interface for MCM-based microsystems

55. A microinstrumenation system for industrial applications

61. Bulk micromachined electrostatic RMS-to-DC converter

62. Integrated silicon microspectrometers

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