51. Ultra-Thin Deformable Silicon Substrates with Lateral Segmentation and Flexible Metal Interconnect
- Author
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Zoumpouidis, T. (author), Wang, L. (author), Bartek, M. (author), Jansen, K.M.B. (author), Ernst, L.J. (author), Zoumpouidis, T. (author), Wang, L. (author), Bartek, M. (author), Jansen, K.M.B. (author), and Ernst, L.J. (author)
- Abstract
Our progress in developing technology modules for deformable single-crystalline-silicon electronics is presented in this contribution. Additional deformability/reliability is accomplished by modifications of the previously reported ultra-thin and flexible CIRCONFLEX technology (1). The flexibility is added in the last steps of the process flow using a combination of lateral segmentation and flexible metal interconnects. The post-processing nature of the added mechanical flexibility is thought to allow sensors and electronics to be built with proven technologies before they are rendered flexible. The additional deformability/reliability is achieved by lateral segmentation of silicon/dielectric layers and connecting these using flexible electrical interconnect. In the current study, segment thickness (silicon/SiO2) of ~1 ?m, segment size between 150 and 450 ?m, spacing of 20-200 ?m and serpentine-shaped aluminum interconnect transferred onto 8- 10 ?m thick polyimide film are characterized by tensile stretching to find out the reliability limits. Compared to our previous reports (2, 3), next to the processing issues also new electrical integrity results obtained from passive electrical test structures implemented on fully segmented polymer-embedded silicon islands are presented., Electrical Engineering, Mathematics and Computer Science
- Published
- 2007
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