51. Metal-organic vapour phase epitaxy of BInGaN quaternary alloys and characterization of boron content
- Author
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Nabila Maloufi, Konstantinos Pantzas, Ian T. Ferguson, M. Abid, G. Orsal, Simon Gautier, Andrei Sirenko, Paul L. Voss, M. Alnot, Abdallah Ougazzaden, Tarik Moudakir, F. Jomard, Zakaria Djebbour, Laboratoire Matériaux Optiques, Photonique et Systèmes (LMOPS), CentraleSupélec-Université de Lorraine (UL), Georgia Tech Lorraine [Metz], Centre National de la Recherche Scientifique (CNRS)-CentraleSupélec-Georgia Institute of Technology [Lorraine, France]-Georgia Institute of Technology [Atlanta]-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Ecole Nationale Supérieure des Arts et Metiers Metz-Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC), Laboratoire de génie électrique de Paris (LGEP), Université Paris-Sud - Paris 11 (UP11)-Université Pierre et Marie Curie - Paris 6 (UPMC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Centre National de la Recherche Scientifique (CNRS), Université de Versailles Saint-Quentin-en-Yvelines (UVSQ), UMI GT CNRS, Georgia Institute of Technology [Atlanta]-Centre National de la Recherche Scientifique (CNRS), Université de Franche-Comté (UFC), Université Bourgogne Franche-Comté [COMUE] (UBFC)-Université Bourgogne Franche-Comté [COMUE] (UBFC)-Ecole Supérieure d'Electricité - SUPELEC (FRANCE)-Georgia Institute of Technology [Atlanta]-CentraleSupélec-Ecole Nationale Supérieure des Arts et Metiers Metz-Centre National de la Recherche Scientifique (CNRS), Laboratoire d'étude des textures et application aux matériaux (LETAM), Université Paul Verlaine - Metz (UPVM)-Centre National de la Recherche Scientifique (CNRS), Groupe d'Etude de la Matière Condensée (GEMAC), Université de Versailles Saint-Quentin-en-Yvelines (UVSQ)-Centre National de la Recherche Scientifique (CNRS), Laboratoire de physique des matériaux (LPM), and Université Henri Poincaré - Nancy 1 (UHP)-Institut National Polytechnique de Lorraine (INPL)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
Indium nitride ,Analytical chemistry ,chemistry.chemical_element ,Gallium nitride ,02 engineering and technology ,Epitaxy ,01 natural sciences ,Inorganic Chemistry ,chemistry.chemical_compound ,X-ray photoelectron spectroscopy ,0103 physical sciences ,Materials Chemistry ,BInGaN ,Metalorganic vapour phase epitaxy ,Boron ,ComputingMilieux_MISCELLANEOUS ,010302 applied physics ,[PHYS.PHYS.PHYS-OPTICS]Physics [physics]/Physics [physics]/Optics [physics.optics] ,InGaN ,ComputerSystemsOrganization_COMPUTER-COMMUNICATIONNETWORKS ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Metal-organic vapour phase epitaxy ,Secondary ion mass spectrometry ,chemistry ,[PHYS.COND.CM-MS]Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci] ,InformationSystems_MISCELLANEOUS ,0210 nano-technology ,Indium - Abstract
LGEP 2010 ID = 608; International audience; BInGaN quaternary alloys with up to 2% boron and 14% of indium have been grown on GaN/sapphire template substrates by metal-organic vapour phase epitaxy (MOVPE). Epitaxial layer composition was determined by secondary ion mass spectroscopy (SIMS), and confirmed by X-ray photoelectron spectroscopy (XPS). Bandgap energies were measured using optical transmission and reflection spectroscopy. We find that boron incorporation in BInGaN reduces the bandgap, causing an effect similar to the increase of indium content in InGaN. However, adding boron has the advantage of decreasing the lattice mismatch with conventional GaN substrates.
- Published
- 2010