1. Low power consumption and high resolution 1280X960 Gate Assisted Photonic Demodulator pixel for indirect Time of flight
- Author
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H. Yamagishi, Y. Ebiko, K. Tatani, T. Ueno, S. Hida, T. Terada, S. Maeda, F. T. Brady, Y. Isogai, Y. Hagiwara, Y. Moriyama, S. Han, T. Suwa, T. Michiel, T. Murase, A. Basavalingappa, S. Kameda, K. Koiso, Hayato Iwamoto, and H. Arai
- Subjects
Materials science ,Pixel ,business.industry ,020208 electrical & electronic engineering ,02 engineering and technology ,Time of flight ,Logic gate ,Shutter ,Wide dynamic range ,0202 electrical engineering, electronic engineering, information engineering ,Optoelectronics ,Demodulation ,Photonics ,Image sensor ,business - Abstract
A 1280×960 floating diffusion storage global shutter image sensor is implemented in a 3D stacked back illuminated indirect time of flight sensor (iToF). The sensor, achieves 18,000e- full well capacity and 32% quantum efficiency (QE) with a pyramid surface for diffraction (PSD) structure [1], utilizing a 3.5µm pixel. Low power consumption is also achieved, due to low leakage current for the iToF pixel and low resistance Cu-Cu connection metal wiring. These device architectures enable high resolution and wide dynamic range 3D depth sensing for both near and far objects.
- Published
- 2020
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