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Your search keyword '"X-ray lithography"' showing total 2 results
Start Over Descriptor "X-ray lithography" Region vermont
2 results on '"X-ray lithography"'

1. Integrated circuits.

Subjects
*INTEGRATED circuits, *X-ray lithography, *TECHNOLOGICAL innovations
Abstract

Reports the innovation of x-ray lithography integrated circuit fabrication technology by JMAR/JSAL NanoLithography Inc. in South Burlington, Vermont. Contract between JMAR and the United States Defense Advanced Research Projects Agency; Improvement in the performance of the Model 5 stepper of JMAR; Application of composite materials.

Published
2002

2. Lithographic process eases sub-100-nm fab.

Author

Kren, Lawrence

Subjects
*X-ray lithography, *LITHOGRAPHY, *X-rays
Abstract

Focuses on a Collimated Plasma Lithography X-ray source and wafer exposure system from Jmar Technologies in South Burlington, Vermont. Functions of the 1-nm-wavelength X-rays; Sources of funding for the project.

Published
2004

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