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At the Pelletron of the Max Planck institute for metal research in Stuttgart an electrostatic spectrometer is operated which is used for high-resolution ion beam analysis using MeV ion beams. In high-resolution RBS and ERD experiments the instrument was shown to provide energy resolutions in the 1 keV range, thus resulting in monolayer depth resolution. The present contribution lines out the main features of the instrument and gives various examples for applications. These include: RBS studies on the surface segregation in Cu[sub 3]Au samples and on Stranski-Krastanov growth of ZnO during hetero-epitaxy on silicon, ERD studies on low-energy boron implants in Si as well as on how to resolve single monolayers of oxygen on copper surfaces and of carbon layers in graphite. [ABSTRACT FROM AUTHOR]