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Abstract: When an energetic and electrically charged beam of particles penetrates a nonconducting material, like crystal, polymer, etc., a permanent change in the nature of the chemical matrix along its path occurs giving rise to damaged sites known as latent tracks having diameter of the order of 10nm. These tracks show an enhanced chemical reactivity as compared to the surrounding material; and, on etching, the damaged sites are enlarged forming nuclear track filters (NTFs). The NTFs so formed find applications in the fields as nuclear physics, geology, radiation dosimetry, material research, medicine and environmental studies. The pore density and pore size homogeneity are important traits of NTFs. These NTFs are also employed for the production of micro/nanostructures through template synthesis which finds various applications for the fabrication of sensors, devices and in the field of opto-electronics. The pore size of the NTF is generally not uniform due to various reasons like material defects in solid state nuclear track detectors (SSNTDs), nonuniform flux density of irradiating beam, variation in the angle of exposure during irradiation, temperature gradient in the etching solution, etc. The present work reports the development of NTFs and study of the effect of pre-etch thermal annealing of irradiated polycarbonate thin films (SSNTDs) on the density and homogeneity of etched pores in developed NTFs. NTFs were developed by irradiating Makrofol (KG) with heavy-ion beam at the UNILAC, Gesellschaft fur Schwerionenforschung (GSI), Darmstadt, Germany and then chemically etching of annealed and unannealed irradiated samples. The pore size, pore density and pore size homogeneity of the NTFs were compared for annealed and unannealed samples. The study indicates decrease in pore size, pore density and increase in homogeneity of pores with post-irradiation and pre-etch thermal annealing. The uniformity of the pores of NTF will lead to uniformity of micro/nanostructures fabricated by using the pores as templates. These uniform micro/nanostructures can act as excellent charge sprayers in the cold cathode emitters. [Copyright &y& Elsevier]