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This study used a Chinese-language version of the Index of Science Reading Awareness to explore the science reading metacognition and comprehension of Taiwanese students. Structural equation modelling results confirmed the underlying model comprised three clusters of metacognitive knowledge: beliefs and confidence in science reading, knowledge of structure of science text, and knowledge of science reading strategies. The main contribution of the current research was to provide evidence about the relationship between metacognitive awareness and comprehension of science text. In addition, data comparisons to Canadian (British Columbia) benchmarks from the original development revealed that metacognitive awareness of science reading deteriorated from elementary to middle school in both countries, and there were no significant differences of metacognitive awareness of science reading between Canadian and Taiwanese students. Instructional suggestions for raising students' metacognitive awareness on science reading were discussed.