Search

Your search keyword '"Hibbs, Michael"' showing total 1 results
Start Over Author "Hibbs, Michael" Region cambridge (mass.)
1 results on '"Hibbs, Michael"'

1. 193-nm lithography at MIT Lincoln Lab.

Author

Hibbs, Michael and Kunz, Roderick

Subjects
*MICROLITHOGRAPHY
Abstract

Focuses on Massachusetts Institute of Technology (MIT) Lincoln Laboratory's development efforts in the field of optical lithography. Excimer-laser as light source; Optical properties and damage resistance; Projection optics; Photoresists.

Published
1995

Catalog

Books, media, physical & digital resources
See catalog results