1. Young’s modulus of multi-layer microcantilevers
- Author
-
Zhikang Deng, Liang He, Yiming Chen, Rongshu Zhuo, Hui Liu, Yue Huang, Hui Yuan, Jinglan Deng, Yi Zheng, Wei Yang, Yang Shi, and Ruiqi Zhu
- Subjects
Materials science ,General Physics and Astronomy ,Modulus ,Young's modulus ,02 engineering and technology ,engineering.material ,021001 nanoscience & nanotechnology ,lcsh:QC1-999 ,Finite element method ,Characterization (materials science) ,symbols.namesake ,020303 mechanical engineering & transports ,0203 mechanical engineering ,Coating ,Spring (device) ,engineering ,symbols ,Composite material ,0210 nano-technology ,Multi layer ,lcsh:Physics ,Beam (structure) - Abstract
A theoretical model for calculating the Young’s modulus of multi-layer microcantilevers with a coating is proposed, and validated by a three-dimensional (3D) finite element (FE) model using ANSYS parametric design language (APDL) and atomic force microscopy (AFM) characterization. Compared with typical theoretical models (Rayleigh-Ritz model, Euler-Bernoulli (E-B) beam model and spring mass model), the proposed theoretical model can obtain Young’s modulus of multi-layer microcantilevers more precisely. Also, the influences of coating’s geometric dimensions on Young’s modulus and resonant frequency of microcantilevers are discussed. The thickness of coating has a great influence on Young’s modulus and resonant frequency of multi-layer microcantilevers, and the coating should be considered to calculate Young’s modulus more precisely, especially when fairly thicker coating is employed.
- Published
- 2017