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X-ray nanotomography is a powerful tool for the characterization of nanoscale materials and structures, but it is difficult to implement due to the competing requirements of X-ray flux and spot size. Due to this constraint, state-of-the-art nanotomography is predominantly performed at large synchrotron facilities. We present a laboratory-scale nanotomography instrument that achieves nanoscale spatial resolution while addressing the limitations of conventional tomography tools. The instrument combines the electron beam of a scanning electron microscope (SEM) with the precise, broadband X-ray detection of a superconducting transition-edge sensor (TES) microcalorimeter. The electron beam generates a highly focused X-ray spot on a metal target held micrometers away from the sample of interest, while the TES spectrometer isolates target photons with a high signal-to-noise ratio. This combination of a focused X-ray spot, energy-resolved X-ray detection, and unique system geometry enables nanoscale, element-specific X-ray imaging in a compact footprint. The proof of concept for this approach to X-ray nanotomography is demonstrated by imaging 160 nm features in three dimensions in six layers of a Cu-SiO2 integrated circuit, and a path toward finer resolution and enhanced imaging capabilities is discussed. [ABSTRACT FROM AUTHOR]

Time division multiplexing (TDM) is being developed as the readout technology of the X-ray integral field unit (X-IFU), a 3,168-pixel X-ray transition-edge sensor (TES) imaging spectrometer that is part of the European Space Agency's Athena satellite mission. Recent improvements in the low X-ray event count rate performance of TDM have been driven by increases in multiplexer bandwidth and the mitigation of settling transients. These methods and design changes have improved the 32-row multiplexed resolution of a NASA LPA 2.5a array from an initial (2.73 ± 0.03) eV to (1.97 ± 0.01) eV resolution at 5.9 keV. We discuss these recent advances in TDM readout, which have been implemented in an 8-column × 32-row spectrometer that will be deployed at the Lawrence Livermore National Laboratory electron beam ion trap (EBIT) facility, and present a model that will inform the design of future systems. [ABSTRACT FROM AUTHOR]