1. Self-organized titanium oxide nano-channels for resistive memory application.
- Author
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Barman, A., Saini, C. P., Sarkar, P., Satpati, B., Bhattacharyya, S. R., Kabiraj, D., Kanjilal, D., Dhar, S., and Kanjilal, A.
- Subjects
TITANIUM oxides ,NANOSTRUCTURED materials ,RESISTIVE force ,SWITCHING circuits ,IRRADIATION ,TEMPERATURE ,X-ray diffraction - Abstract
Towards developing next generation scalable TiO
2 -based resistive switching (RS) memory devices, the efficacy of 50 keV Ar+ -ion irradiation to achieve self-organized nano-channel based structures at a threshold fluence of 5×1016 ions/cm2 at ambient temperature is presented. Although x-ray diffraction results suggest the amorphization of as-grown TiO2 layers, detailed transmission electron microscopy study reveals fluence-dependent evolution of voids and eventual formation of selforganized nano-channels between them. Moreover, gradual increase of TiO/Ti2 O3 in the near surface region, as monitored by x-ray photoelectron spectroscopy, establishes the upsurge in oxygen deficient centers. The impact of structural and chemical modification on local RS behavior has also been investigated by current-voltage measurements in conductive atomic force microscopy, while memory application is manifested by fabricating Pt/TiO2 /Pt/Ti/SiO2 /Si devices. Finally, the underlying mechanism of our experimental results has been analyzed and discussed in the light of oxygen vacancy migration through nano-channels. [ABSTRACT FROM AUTHOR]- Published
- 2015
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