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Amorphous Li–Si–Ti–P–O (LSTP) thin film electrolyte was successfully prepared by radio frequency magnetron sputtering using Li1.4Si0.4Ti1.6 (PO4)3 powder targets and stainless steel sheet as substrate. The effects of sputtering power on the structure, morphology, ionic conductivity, and electronic conductivity of the LSTP thin film electrolyte were investigated. The results showed that the LSTP thin film electrolyte obtained with sputtering power kept at 160 W, displayed uniform particles compacted in arrangement, proper stoichiometric ratio to the powder target as well as sufficient Li-ion for diffusion. Hence, it held a considerable ionic conductivity of 4.12 × 10−6 S cm−1 and a high σion/σele ratio about 8 magnitudes, indicating that it can be used as film electrolyte in all-solid-state lithium batteries. [ABSTRACT FROM AUTHOR]

This work introduces a facile approach for preparation of binary nanocomposite thin film electrodes for lithium-ion batteries with excellent storage capability, high rate performance, and good electrochemical stability. The Li4Ti5O12-TiO2 film electrodes are prepared by radio frequency (RF) magnetron sputtering deposition using a Li4Ti5O12 and TiO2 powder mixture target as sputtering source in an argon atmosphere. The Li4Ti5O12-TiO2 electrode yields good electrochemical performance in terms of high capacity (295 mAh g−1) at a current density of 0.1 C, good cycling stability (≈5 % capacity loss after 100 cycles at 0.1 C), and excellent rate capability (158 mAh g−1 at a current density of 5 C). The factors contributing to the excellent electrochemical performance are related to the binary nanocomposite structure. The results suggest that the Li4Ti5O12-TiO2 nanocomposite thin film can be used as an anode material for high-performance lithium-ion batteries. [ABSTRACT FROM AUTHOR]

This manuscript focuses on how to improve the electronic conductivity and lithium-ion diffusivity of Li4Ti5O12 thin films, which present a serious constraint to the development of the solid-state lithium-ion batteries. Given this understanding, we have found that creating amorphous structural features and hierarchical channels of thin films form a very simple yet effective approach to solve the problem. The unique structural features and high electrical conductivity of the as-prepared thin films result in high capacity (283.5 mAh g−1 at 10 μA cm−2) and good cyclic stability (≈3 % capacity loss after 100 cycles at 10 μA cm−2). These important findings could open up new opportunities for Li4Ti5O12 in constructing high-performance binder-free energy storage devices. [ABSTRACT FROM AUTHOR]

Indium tin oxide (ITO) thin films were deposited on quartz substrates by radio frequency (RF) sputtering with different RF power (100-250 W) using the powder target at room temperature. The effect of sputtering power on their structural, electrical and optical properties was systematically investigated. The intensity of (400) orientation clearly increases with the sputtering power increases, although the films have (222) preferred orientation. Increasing sputtering power is benefit for lower resistivity and transmittance. The films were annealed at different temperature (500-800 °C), then we explored the relationship between their electro-optical and structural properties and temperature. It has been observed that the annealed films tend to have (400) orientation and then show the lower resistivity and transmittance. The ITO thin film prepared by RF sputtering using powder target at 700 °C annealing temperature and 200 W sputtering power has the resistivity of 2.08 × 10 Ω cm and the transmittance of 83.2 %, which specializes for the transparent conductive layers. [ABSTRACT FROM AUTHOR]

Abstract: This paper reports the correlation between the microstructure and the physical properties of transparent BaTi0.85Sn0.15O3 (BTS) thin films with thicknesses of 90–360nm by radio frequency magnetron sputtering on the tin doped indium oxide (ITO)/glass substrate. All of the BTS/ITO/glass samples have relatively high optical transparency with over 75% in the visible light region. The dielectric constant and tunability of BTS films increase with thickness due to comparatively better crystallinity. The thicker BTS film is observed in an inter-diffusion between BTS film and ITO electrode from the result of secondary ion mass spectrometry depth profiling and then shown in a higher leakage current density. [Copyright &y& Elsevier]

In this paper, indium tin oxide (ITO) targets with different densities were used to deposit ITO thin films. The thin films were deposited from these targets at room temperature and annealed at 750°C. Microstructural, electrical, and optical properties of the as-prepared films were studied. It was found that the target density had no effect on the properties or deposition rate of radiofrequency (RF)-sputtered ITO thin films, different from the findings for direct current (DC)-sputtered films. Therefore, when using RF sputtering, the target does not require a high density and may be reused. [ABSTRACT FROM AUTHOR]

Abstract: The Ba0.5Sr0.5TiO3 (BST) thin film with the thickness of 400 nm deposited from powder target is prepared by the radio-frequency magnetron sputtering technique. The deposition rate of BST film is estimated to be 45 nm/min, which is very fast for ferroelectric materials. The dielectric properties of the as-prepared BST thin film are demonstrated. High dielectric tunability up to 42.7% and low dielectric loss small to 0.01 are achieved at a low applied voltage of 5 V. The results demonstrate that the RF magnetron sputtering from powder target is a versatile, novel technique for the deposition of high-quality ferroelectric thin films. [Copyright &y& Elsevier]

Nanopillar crystalline indium tin oxide (ITO) thin films were deposited on soda-lime glass substrates by radio frequency (RF) magnetron sputtering under the power levels of 100 W, 150 W, 200 W and 250 W. The preparation process of thin films is divided into two steps, firstly, sputtering a very thin and granular crystalline film at the bottom, and then sputtering a nanopillar crystalline film above the bottom film. The structure, morphology, optical and electrical properties of the nanopillar crystalline ITO thin films were investigated. From X-ray diffraction (XRD) analysis, the nanopillar crystalline thin films shows (400) preferred orientation. Due to the effect of the bottom granular grains, the crystallinity of the nanopillar crystals on the upper layer was greatly improved. The nanopillar crystalline ITO thin films exhibited excellent electrical properties, enhanced visible light transmittance and a highly infrared reflectivity in the mid-infrared region. It is noted that the thin film deposited at 200 W showed the best combination of optical and electrical performance, with resistivity of 1.44 × 10−4 Ω cm, average transmittance of 88.49% (with a film thickness of 1031 nm) and IR reflectivity reaching 89.18%. [ABSTRACT FROM AUTHOR]

The lithium titanium oxynitride (LTON) thin film electrode was prepared by radio frequency (RF) magnetron sputtering deposition using a cubic spinel structure Li 4 Ti 5 O 12 (LTO) powder target in a N 2 atmosphere for lithium ion batteries. XRD and SEM test results showed that the thin film was composed of weak crystal or amorphous structure and that its surface was homogeneous. XPS analyses indicated that nitrogen atoms were actually incorporated into the LTO matrix framework. The substitution of nitrogen for oxygen in the thin film created more abundant cross-linking structures, which favored the higher mobility of lithium ions. The LTON had a high capacity of 290 mAh g −1 at 0.1C, excellent rate capability of 160 mAh g −1 at 5C and only ≈7% capacity loss after 100 cycles at 5C charge and discharge rate. These properties make this thin film electrode a promising candidate material for use in thin film lithium ion batteries. [ABSTRACT FROM AUTHOR]

Abstract: A novel three-dimensional (3D) porous MnO2 film has been deposited onto a foamed nickel with another 3D structure by a hydrothermal method using potassium permanganate and sodium dodecylsulfate under neutral condition. Characterized by powder X-ray diffraction, scanning electron microscopy and thermal analysis, so formed 3D structure film is composed of nanosheets or nanofibers and has an amorphous and hydrous nature. The high specific capacitance of 241Fg−1 is observed at the current density of 1Ag−1, investigated by means of cyclic voltammetry and constant current charge–discharge cycling in 1M Na2SO4 aqueous solutions. The film shows a good reversibility, power characteristics and cycling stability. It is promising for supercapacitor application. [Copyright &y& Elsevier]

The electrical properties of amorphous thin solid films of Li 1.3 Al 0.3 Ti 1.7 (PO 4 ) 3 (LATP) electrolyte deposited on stainless steel substrates via radio-frequency magnetron sputtering from LATP powder targets were studied. The results indicated that the LATP thin film electrolyte deposited in Ar-O 2 atmosphere has a high ionic conductivity of 6.47×10 −6 S cm −1 and a low electronic conductivity of 2.34×10 −14 S cm −1 . The easy fabrication of LATP thin films, high ionic conductivity together with the small electronic conductivity suggest that LATP thin films are promising as a candidate for solid electrolytes in all-solid-state thin film lithium batteries. [ABSTRACT FROM AUTHOR]