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The effect of nitrogen concentration on the interfacial and optical properties, as well as band offsets of HfTiO thin films by rf sputtering HfTi alloy target has been systematically investigated. The results indicate that an interfacial layer is unavoidably formed between HfTiON thin films and Si substrate, and the main content of the interfacial layer is silicate. No silicide is formed in the interfacial layer which is partly responsible for the poor electrical properties of high-k gate dielectrics. The optical properties of HfTiON films change, such as the refractive index decreases, while the extinction coefficient increases with the increase of N content, due to the defects increase in the films. The results also indicate that the bandgap and VB offset reduce with the introduction of N into HfTiO thin films. The CB offset of the HfTiON thin films is almost unchanged indicating that the N concentration has little effect on CB offset. However, the bandgap and band offsets are all higher than 1 eV, the sufficient band offsets still makes sputtering-derived HfTiON films by HfTi alloy target a promising high-k gate dielectric for future complementary metal oxide semiconductor technology. [ABSTRACT FROM AUTHOR]

Thickness-modulated optical dielectric constants and band alignments of HfOxNy films grown by sputtering have been investigated by spectroscopic ellipsometry (SE) and x-ray photoelectron spectroscopy. Based on SE measurements, it has been noted that an increase in optical dielectric constant and band gap has been observed as a function of the film thickness. Analyses of thickness-dependent band alignment of the HfOxNy/Si system indicate that the valence band offset increases, but only slight change in the conduction band offset, resulting from the thickness-induced change in the structure. The suitable optical dielectric constants and band offsets relative to Si make sputtering-derived HfOxNy film a promising candidate for high-k gate dielectrics. [ABSTRACT FROM AUTHOR]

N-doped ZnO films were prepared by annealing zinc oxynitride films deposited by rf reactive sputtering. Two Raman peaks were observed at 274 and 580 cm-1. According to the variation of the integral intensity of these two peaks, the nitrogen activation at 500 °C [the activation temperature (AT)] has been obtained. Below the AT, the integral intensities of them show a different variation trend. X-ray photoelectron spectroscopy (XPS) indicates the N chemical state variation for them and finds the activated Zn-N bond. Further analyses by photoluminescence (PL) spectra and spectroscopic ellipsometry (SE) have been carried out. The activated sample exhibits a symmetric emission peak at 3.22 eV assigned to be the A0X emission at room temperature. SE investigation takes account of samples within the different temperature span divided by the AT. Different factors, such as nitrogen dopant (N)O and the nanocrystal growth, which affect the redshift of the absorption edges, have been discussed. [ABSTRACT FROM AUTHOR]

The structural stability and optical properties of ultrathin HfAlOx films grown by facing-target reactive sputtering, depending on the postannealing temperature, have been determined via x-ray photoelectron spectroscopy and spectroscopic ellipsometry (SE). By virtue of the chemical shifts of Hf4f, Al2p, and Si2p core-level spectra, it has been found that the structural stability of HfAlOx/Si system sustains up to 800 °C. However, the breaking of the Hf–Al–O bond and the phase separation take place drastically at the annealing temperature of 900 °C. In particular, the information of an interfacial Si–O–Si bond as the dominant reaction during the postannealing treatment has been observed, confirmed by Fourier transform infrared spectroscopy. Analysis by SE, based on the Tauc-Lorentz model, has indicated that increase in the refractive index and reduction in thickness has been observed as a function of annealing temperature, originating from the annealing-induced higher packing density. The change of the complex dielectric functions and bandgap Eg correlated with the annealing temperature are discussed in detail. [ABSTRACT FROM AUTHOR]

The microstructure and optical dielectric constants of HfOxNy thin films deposited by using radio frequency reactive magnetron sputtering have been investigated at various substrate temperatures. Fourier transform infrared spectroscopy spectra indicate that an interfacial layer has been formed between the Si substrate and the HfOxNy thin film during deposition. Spectroscopy ellipsometry (SE) results show that the substrate temperature has a strong effect on physical properties of HfOxNy thin films such as refractive index n and extinction coefficient k. Meanwhile, the optical dielectric functions of the films have determined using SE data and optical absorption properties of HfOxNy thin films deposited at different substrate temperatures have also been studied. [ABSTRACT FROM AUTHOR]

The effect of nitrogen atom doping on the optical properties and dielectric constant of HfO2 films has been systematically investigated. Spectroscopic ellipsometry was employed to investigate the optical properties of nitrogen incorporated HfO2 films. The values of average oscillator strength and average oscillator position extracted from spectroscopic ellipsometry demonstrated that nitrogen incorporation could influence the dipole oscillator strength and oscillator position of HfO2. A physical model of dipole structures was proposed to verify the enhancement of dielectric constant of HfO2 films by nitrogen incorporation. [ABSTRACT FROM AUTHOR]

Effects of nitrogen incorporation on interfacial property, band gap, and band alignments of high-k Y2O3 gate dielectrics have been investigated. It was found that the incorporation of nitrogen into Y2O3 films can effectively suppress the growth of the interfacial layer between Y2O3 and Si substrate. The incorporation of nitrogen into Y2O3 films leads to the reduction of band gap and valence band offset, but not the conduction offset of Y2O3 films. High temperature annealing will help to increase the band gap and valence band offset of YOxNy film due to the release of the interstitial N atoms. [ABSTRACT FROM AUTHOR]

Temperature-dependent interfacial chemical bonding states and band alignment of HfOxNy/SiO2/Si gate stacks have been investigated by X-ray photoemission spectroscopy (XPS) and spectroscopic ellipsometry (SE). By means of the chemical shifts of Hf 4f, Si 2p, O 1s, and N 1s core-level spectra, it has been found that the chemical stability of the HfOxNy/SiO2/Si stacks strongly depends on the annealing temperature. Analysis of temperature-dependent band alignment of HfOxNy/SiO2/Si stacks suggests that the valence band offset ΔEv increases slowly from 1.82 eV for as-grown film to 2.55 eV for annealed film at 700 °C; however, the values of conduction band offset ΔEc only demonstrates a slight change in the vicinity of 1.50 eV. From the band offset viewpoint, HfOxNy/SiO2/Si gate stack could be a promising candidate for high-k gate dielectrics. [ABSTRACT FROM AUTHOR]

We report in this letter that Hafnium oxynitride (HfOxNy) gate dielectrics were prepared by radio frequency (RF) reactive magnetron sputtering and optical properties of the HfOxNy thin films were investigated by spectroscopic ellipsometry with photon energy of 0.75–6.5 eV at room temperature. The investigations showed that the annealing temperatures have a strong effect on the optical properties of HfOxNy thin films. With increased annealing temperature, the refractive index n is observed to increase, while the extinction coefficient k decreases, respectively. The changes of the complex dielectric functions and the optical band gap Eg with the annealing temperature are also discussed. [ABSTRACT FROM AUTHOR]

The optical properties of δ-Bi2O3 thin films were investigated using spectroscopic ellipsometry and optical absorption spectrum. δ-Bi2O3 thin films were grown on Si and quartz substrates under different oxygen flow ratios (OFR) by radio frequency reactive magnetron sputtering. The Tauc-Lorentz dispersion method was adopted to model the optical dispersion functions of the thin films. The optical bandgap was obtained by three different methods. It was found that refractive index and extinction coefficient decrease, and the optical bandgap has a slight blue shift with increasing the OFR. Factors influencing the optical constants and optical bandgap are discussed. [ABSTRACT FROM AUTHOR]

Spectroscopic ellipsometry with photon energy 0.75–6.5 eV at room temperature has been used to derive the optical properties of nitrogen-incorporated HfO2 films on Si(100) substrates grown by radio-frequency reactive sputtering using different N2/(N2+O2+Ar) gas ratios from 20% to 50%. Excellent agreement has been found between the experimental and the simulated spectra, in which an empirical dielectric dispersion relation based on Tauc-Lorentz model has been successfully adopted. Increases in the refractive index n and the extinction coefficient. k, with increases in nitrogen-incorporation content are observed due to the nitrogen-incorporation-induced higher packing density. The change of the complex dielectric functions and reduction in the optical band gap with an increase in nitrogen concentration resulting from the effect of the nitrogen-incorporation on the structure are discussed in detail. [ABSTRACT FROM AUTHOR]

Large-scale of crystalline GaN nanowires (diameter∼50 nm) have been fabricated through chemical-vapor deposition in the nanochannels of the anodic alumina template. X-ray diffraction and selected area electron diffraction pattern investigations indicate that the nanowires are single crystal with hexagonal wurtzite structure. A typical scanning electron microscopy image and the energy dispersive x-ray spectroscopy results indicate that indium nanoparticles only act as catalyst in GaN nanowires growth. At room temperature, photoluminescence spectrum of the GaN nanowire arrays shows a visible broadband with three peaks, which are located at about 363, 442, and 544 nm. The light emission may be attributed to GaN band-edge emission, the existence of defects or surface states, and the interaction between the ordered GaN nanowires and anodic alumina membrane. The growth mechanism of crystalline GaN nanowires is discussed. The method makes it possible to synthesize other nitride nanowire arrays. © 2001 American Institute of Physics. [ABSTRACT FROM AUTHOR]