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A theoretical approach for the analysis of Lamb waves in grating configurations based on the Floquet-Bloch theorem is developed. Subsequently, it is applied for the prediction of the propagation characteristics of the fundamental symmetric Lamb wave (S0) propagating in thin c-oriented aluminum nitride (AlN) membranes with different types of aluminum grating configurations. The calculations indicate the existence of a frequency stop band exhibiting a complex behavior. The proposed analysis is to be used for the design and optimization of high velocity thin-film Lamb wave resonators. It can easily be adapted for the analysis of arbitrary Lamb waves in periodic gratings. [ABSTRACT FROM AUTHOR]

This work makes an overview of the progress made during the last decade with regard to a novel class of piezoelectric microwave devices employing acoustic Lamb waves in micromachined thin film membranes. This class of devices is referred to as either thin film Lamb wave resonators or piezoelectric contour-mode resonators both employing thin film aluminum nitride membranes. These devices are of interest for applications in both frequency control and sensing. High quality factor Lamb wave resonators exhibiting low noise, low loss and thermally stable performance are demonstrated and their application in high resolution gravimetric and pressure sensors further discussed. A specific emphasis is put on the ability of these devices to operate in contact with liquids. Future research directions are further outlined. [ABSTRACT FROM AUTHOR]

A novel concept for the development of thin-film micro-acoustic resonators based on the coupling between different plate acoustic modes is demonstrated. The basic principles for the design and fabrication of intermode-coupled plate acoustic wave resonators on c-textured thin aluminum nitride films are presented. More specifically, the lowest order symmetric S0 Lamb wave is excited and then coupled to the fundamental thickness shear bulk resonance by means of a metal strip grating with specific periodicity. The experimental results demonstrate that the grating-assisted intermode coupling can be employed in high-frequency resonators inheriting the low dispersive nature of the S0 mode in combination with the energy localization in the plate bulk typical for the fundamental thickness shear resonance. [ABSTRACT FROM AUTHOR]

In this work the applicability of the coupling-of-modes (COM) approach to the analysis of thin AlN film plate acoustic resonators (FPAR), utilizing the S0 Lamb wave, is discussed. Analysis based on the Floquet-Bloch theorem as well as COM parameter extraction from a micromachined FPAR test structure are simultaneously used to verify the applicability of the COM approach. Finite element model simulation is used to further study the contribution of the higher order mass loading effects over the Lamb wave propagation under a periodical grating. A possibility to achieve zero sensitivity of the FPAR resonance with respect to the grating strip thickness is identified and physically interpreted for the first time. [ABSTRACT FROM AUTHOR]

Improved performance thin-film plate acoustic wave resonators (FPAR) using the lowest order symmetric Lamb wave (So) propagating in highly textured A1N membranes have been previously demonstrated for the first time. In this work, an experimental study of the resonators' performance vs. a variety of design parameters is performed. Devices operating in the vicinity of the stopband center exhibiting a Q-value of up to 3000 at a frequency of around 875 MHz are demonstrated. Further, low-loss high-Q micromachined 2-port longitudinally coupled thin-film resonators using the SO mode are demonstrated for the first time. For the analysis of the proposed structures, the coupling-of-modes (COM) approach is successfully employed. Initially, the COM model is used for the extraction of physical parameters from one-port FPAR measurements. Subsequently, using the COM model, a satisfactory agreement with the proposed experimental frequency characteristics of SO 2-port FPARs has been achieved, and possibilities for further improvements in the performance discussed. Finally, the frequency spectrum of the one-port devices has been studied and the excited plate modes at different frequencies identified and presented with their Q-factors and temperature coefficients of frequency (TCF). [ABSTRACT FROM AUTHOR]

Thin film integrated circuits compatible resonant structures using the lowest order symmetric Lamb wave propagating in thin aluminum nitride (AlN) film membranes have been studied. The 2-µm thick, highly c-oriented AIN piezoelectric films have been grown on silicon by pulsed, direct-current magnetron reactive sputter deposition. The films were deposited at room temperature and had typical full-width, half-maximum value of the rocking curve of about 2 degrees. Thin film plate acoustic resonators were designed and micromachined using low resolution photolithography and deep silicon etching. Plate waves, having a 12-µm wavelength, were excited by means of both interdigital (IDT) and longitudinal wave transducers using lateral field excitation (LW-LFE), and reflected by periodical aluminum-strip gratings deposited on top of the membrane. The existence of a frequency stopband and strong grating reflectivity have been theoretically predicted and experimentally observed. One-port resonator designs having varying cavity lengths and transducer topology were fabricated and characterized. A quality factor exceeding 3000 has been demonstrated at frequencies of about 885 MHz. The IDT based film plate acoustic resonators (FPAR) technology proved to be preferable when lower costs and higher Qs are pursued. The LW-LFE-based FPAR technology offers higher excitation efficiency at costs comparable to that of the thin film bulk acoustic wave resonator (FBAR) technology. [ABSTRACT FROM AUTHOR]

A concept for the development of thin film micro-acoustic resonators is demonstrated. The basic principles for the design and fabrication of zero-group-velocity Lamb acoustic wave resonators on c-textured thin aluminum nitride films are presented. The experimental results demonstrate that the zero-group-velocity waves can be employed in high frequency resonators with small form factors. [ABSTRACT FROM AUTHOR]

The basic principles and technology for the development of lateral-field-excited Lamb acoustic wave resonators on sputter-deposited c-oriented thin aluminum nitride films are presented. The experimental results demonstrate that Lamb waves can be successfully used as an alternative to high-velocity surface acoustic waves. [ABSTRACT FROM AUTHOR]

Abstract: Piezoelectric c-textured Al(1−x)Sc x N thin films, where the Sc relative concentration, x, varies in the range 0–0.15 have been studied in view of radio frequency (RF) electro-acoustic applications. Thin film bulk acoustic wave resonators (FBARs) employing these films were fabricated and characterized as a function of the Sc concentration for the first time. The measured electromechanical coupling is found to increase by as much as 100% in the above concentration range. The results from this work underline the potential of the c-textured Al(1−x)Sc x N based FBARs for wide band RF applications. [Copyright &y& Elsevier]