Author: "Sharpless, R. L" / Topic: thin films - Searchworks@Jio Institute Digital Library Search Results

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Author: Stalder, K. R. and Sharpless, R. L.
Subjects: *PLASMA gases, *HYDROCARBONS, *THIN films
Abstract: Presents a study that described plasma properties of a hydrocarbon arcjet used in the plasma deposition of diamond thin films. Information on how the ject operated; Optical emission spectra; Langmuir probe diagnosis of the plasma.
Published: 1990
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