1. Optimization of ruthenium as a buffer layer for non-collinear antiferromagnetic Mn3X films.
- Author
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Kurdi, S., Zilske, P., Xu, X. D., Frentrup, M., Vickers, M. E., Sakuraba, Y., Reiss, G., Barber, Z. H., and Koo, J. W.
- Subjects
MAGNETRON sputtering ,BUFFER layers ,THIN film deposition ,THIN films ,RUTHENIUM ,TWINNING (Crystallography) ,MOLECULAR beam epitaxy - Abstract
Two thin film deposition routes were studied for the growth of high quality single crystalline Ru (0001) epitaxial films on c-Al
2 O3 substrates using radio frequency-magnetron sputtering. Such films are very important as buffer layers for the deposition of epitaxial non-collinear antiferromagnetic Mn3 X films. The first route involved depositing Ru at 700 °C, leading to a smooth 30 nm thick film. Although, high resolution x-ray diffraction revealed twinned Ru film orientations, in situ post-annealing eliminated one orientation, leaving the film orientation aligned with the substrate, with no in-plane lattice rotation and a large lattice mismatch (13.6%). The second route involved the deposition of Ru at room temperature followed by in situ post-annealing at 700 °C. Transmission electron microscopy confirmed a very high quality of these films, free of crystal twinning, and a 30° in-plane lattice rotation relative to the substrate, resulting in a small in-plane lattice mismatch of –1.6%. X-ray reflectivity demonstrated smooth surfaces for films down to 7 nm thickness. 30 nm thick high quality single-crystalline Mn3 Ga and Mn3 Sn films were grown on top of the Ru buffer deposited using the second route as a first step to realize Mn3 X films for antiferromagnetic spintronics applications. [ABSTRACT FROM AUTHOR]- Published
- 2020
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