1. Influence of oxygen partial pressure on the structural, optical and electrochromic properties of NiO thin films grown by magnetron sputtering.
- Author
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Tuna, Öcal, Mak, Ali Kemal, Öztürk, Osman, and Karabulut, Mevlüt
- Subjects
NICKEL oxides ,PARTIAL pressure ,NICKEL oxide ,MAGNETRON sputtering ,THIN films ,DC sputtering ,OPTICAL properties ,X-ray photoelectron spectroscopy - Abstract
Nickel oxide (NiO) thin films were grown on glass substrate by direct current magnetron sputtering at different oxygen (O
2 ) partial pressure. The influence of O2 partial pressure on the structural, optical, and electrochromic properties of NiO thin films were investigated. A strong relation between O2 partial pressure and NiO film properties such as optical transparency, crystallinity, grain size, lattice constant and the electrochromic properties was realized. The evaluation of the X-ray diffraction peaks indicated an increase with the in-plane lattice constant with the direction of (200) resulting in a strain on the NiO films. Both Ni2+ and Ni3+ were observed in NiO thin layers from X-ray photoelectron spectroscopy results and their concentration varied according to the O2 partial pressure. Optimization of O2 partial pressure led to reach the highest electrochromic efficiency of 53 cm2 /C and optical transmittance variation of 51%. [ABSTRACT FROM AUTHOR]- Published
- 2023
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