1. Electrochemical Characteristics of Molybdenum/ Aluminum-Neodymium Double Thin Film in Tetramethyl-Ammonium Hydroxide Solution.
- Author
-
Huang, J. -H. and Yen, S. -C.
- Subjects
MOLYBDENUM ,THIN films ,NEODYMIUM ,THIN film transistors ,LIQUID crystal displays - Abstract
The two-layer thin film structure of Mo over an Al-Nd alloy is widely used for gate-metal lines in thin film transistor liquid crystal displays (TFT-LCD). In this study, the blemishes appearing on the surface of these double-layer films after a 5-min immersion in alkaline tetramethyl-ammonium hydroxide (TMAH) solutions have been explored. The electrochemical characteristics of the two-layer films/electrolyte interface in alkaline TMAH solution are also investigated using electrochemical measurement and surface analytical techniques. From the experimental results, it can be deduced that the Al-Nd layer is sensitive to deposition temperature. The Al-Nd layer that deposited at high temperature was difficult to be covered completely by the Mo-capped layer. Some Al active regions are exposed to alkaline TMAH solutions, and more galvanic local corrosion is induced. Lowering the film deposition temperature and covering the Mo layer sufficiently have been considered the two efficient methods to avoid blemishes in this study. it is helpful to improve the quality of metal line deposition for the processes of liquid crystal display manufacturing. [ABSTRACT FROM AUTHOR]
- Published
- 2007
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