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Abstract: Amorphous (Al2O3) x –(TiO2)1−x composite films are prepared using r.f. unbalanced magnetron sputtering in an atmosphere of argon and oxygen at room temperature. The optical constants of (Al2O3) x –(TiO2)1−x composite films are linearly dependent on the Al2O3 mole fraction in the Al2O3–TiO2 composite film. The optical constants of these Al2O3–TiO2 composite films can be made to meet the optical requirements for a high transmittance attenuated phase shift mask (HT-APSM) blank by tuning the Al2O3 mole fraction. The Al2O3 mole fraction range that would allow the films to meet the optical requirements of an HT-APSM blank for ArF immersion lithography is calculated to be between 76% and 84%. One π-phase-shifted Al2O3–TiO2 composite thin film to be used as an HT-APSM blank for ArF immersion lithography is fabricated and is shown to satisfy the optical requirements. [Copyright &y& Elsevier]

Abstract: Herein we report a direct synthesis of FeSe nanostructure with tetragonal phase by electrochemical deposition. The FeSe thin films have been successfully deposited onto indium doped tin oxide coated conducting glass (ITO) in the aqueous electrolytic bath containing FeSO4 and SeO2. The deposition mechanism was inferred that the Se4+ ions are reduced to Se and successively oxidized to Se2−, which was immediately involved with Fe2+ to form the tetragonal structure. This new approach promises to be of strong significance for succeeding fabrication of iron-based superconductor. [Copyright &y& Elsevier]

We have employed ferromagnetic resonance to obtain magnetic anisotropy information in a series of YIG/GGG superlattices and a single YIG thin film with temperature variations. The Curie temperature of these samples increases with the YIG layer thickness, reaching saturation beyond a specific YIG thickness. As temperature rises, the magnitude of the calculated magnetocrystalline anisotropy constant decreases while the uniaxial anisotropy constant exhibits growing behavior. [Copyright &y& Elsevier]