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In this work, the structural and electrical properties of metalorganic chemical vapor deposited Si-doped β-(AlxGa1−x)2O3 thin films grown on (010) β-Ga2O3 substrates are investigated as a function of Al composition. The room temperature Hall mobility of 101 cm2/V s and low temperature peak mobility (T = 65 K) of 1157 cm2/V s at carrier concentrations of 6.56 × 1017 and 2.30 × 1017 cm−3 are measured from 6% Al composition samples, respectively. The quantitative secondary ion mass spectroscopy (SIMS) characterization reveals a strong dependence of Si and other unintentional impurities, such as C, H, and Cl concentrations in β-(AlxGa1−x)2O3 thin films, with different Al compositions. Higher Al compositions in β-(AlxGa1−x)2O3 result in lower net carrier concentrations due to the reduction of Si incorporation efficiency and the increase of C and H impurity levels that act as compensating acceptors in β-(AlxGa1−x)2O3 films. Lowering the growth chamber pressure reduces Si concentrations in β-(AlxGa1−x)2O3 films due to the increase of Al compositions as evidenced by comprehensive SIMS and Hall characterizations. Due to the increase of lattice mismatch between the epifilm and substrate, higher Al compositions lead to cracking in β-(AlxGa1−x)2O3 films grown on β-Ga2O3 substrates. The (100) cleavage plane is identified as a major cracking plane limiting the growth of high-quality Si-doped (010) β-(AlxGa1−x)2O3 films beyond the critical thicknesses, which leads to highly anisotropic and inhomogeneous behaviors in terms of conductivity. [ABSTRACT FROM AUTHOR]

Beta gallium oxide (β-Ga2O3) is a promising ultra-wide bandgap semiconductor with attractive physical properties for next-generation high-power devices, radio frequency electronics, and solar-blind ultraviolet radiation detectors. Here, we present an overview and perspective on the development of MOVPE-grown (100) β-Ga2O3 thin films and its role in supplementing high-power electronics. We review the development path of the growth process on (100) β-Ga2O3 thin films with a discussion regarding the solved and remaining challenges. The structural defect formation mechanism, substrate treatment strategies, and different growth windows are analyzed to optimize the grown film to fulfill the requirements for device fabrication. Toward industrial applications, MOVPE-grown β-Ga2O3 thin films are evaluated in two aspects: thick layers with smooth surface roughness and the electrical properties in terms of high carrier mobility and low doping concentration. Based on the reviewed results, we propose strategies in substrate preparation treatments and supportive tools such as the machine learning approaches for future growth process optimization and envision the rising interest of the β-Ga2O3-related alloy, β-(AlxGa1−x)2O3. [ABSTRACT FROM AUTHOR]