1. Nano-hardness estimation by means of Ar+ ion etching.
- Author
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Bartali, R., Micheli, V., Gottardi, G., Vaccari, A., Safeen, M.K., and Laidani, N.
- Subjects
- *
CRYSTAL etching , *HARDNESS , *ARGON , *SURFACE coatings , *MECHANICAL properties of metals , *RARE earth ions - Abstract
When the coatings are in nano-scale, the mechanical properties cannot be easily estimated by means of the conventional methods due to: tip shape, instrument resolution, roughness, and substrate effect. In this paper, we proposed a semi-empirical method to evaluate the mechanical properties of thin films based on the sputtering rate induced by bombardment of Ar + ion. The Ar + ion bombardment was induced by ion gun implemented in Auger electron spectroscopy (AES). This procedure has been applied on a series of coatings with different structure (carbon films) and a series of coating with a different density (ZnO thin films). The coatings were deposited on Silicon substrates by RF sputtering plasma. The results show that, as predicted by Insepov et al., there is a correlation between hardness and sputtering rate. Using reference materials and a simple power law equation the estimation of the nano-hardness using an Ar + beam is possible. [ABSTRACT FROM AUTHOR]
- Published
- 2015
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