1. Sputtering of UF4 by high energy heavy ions
- Author
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Meins, C. K, Griffith, J. E, Mendenhall, M. H, Seiberling, L. E, Tombrello, T. A, and Qiu, Y
- Subjects
Solid-State Physics - Abstract
The sputtering of UF4 targets by energetic beams of O-16, F-19, and Cl-35 ions has been investigated for beam energies in the range 0.12 to 1.5 MeV/amu. The sputtering yields, which follow the same trend as the electronic part of the projectile energy loss in the material, are observed to have a strong dependence on the charge state of the incident ions. Data have been taken both in transmission and reflection (0 and 180 deg to the incident beam direction, respectively). Energy spectra of the neutral sputtered particles have been obtained for 5 MeV F-19 ions and for 13 MeV Cl-35 ions; in both cases the spectrum has a Maxwellian form. The data obtained are compared with several models of the high energy sputtering process.
- Published
- 1983