This article focuses on the implementation of energy efficiency measures in a semiconductor building. Those measures include system optimization on the terminal units (TBs), office air-handling units (AHUs), make-up air units (MAUs), exhaust systems, fan filter units (FFUs), fan tower units (FTUs) and recirculation air-handling units (RAHs), fan coil units, and central chiller plant and boiler plant. Twelve permanent power meters were installed throughout the building to measure the total building electricity demand, solar generated electricity demand, HVAC and non-HVAC equipment demand to quantify the energy savings from the implementation of the energy efficiency measures. The electricity demand data have been collected for two years at 15-minute intervals and evaluated, with the energy saving adjusted by the outside air temperature. The electricity saving for this building is about 54.49 kWh/ft2/year (589.64 kWh/m2/year), which reduces the total building electricity consumption about 20%. The gas savings is about 0.1MMBtu/ft2/year (493 km3 of natural gas/year, 30% of the total building gas consumption) based on the daily reading from the facility engineer. The simple payback without incentives is 1.5 years. [ABSTRACT FROM PUBLISHER]