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Due to their high frame rates and dynamic range, large area coverage, and high signal-to-noise ratio, hybrid silicon pixel detectors are an established standard for photon science applications at X-ray energies between 2 keV and 20 keV. These properties also make hybrid detectors interesting for experiments with soft X-rays between 200 eV and 2 keV. In this energy range, however, standard hybrid detectors are limited by the quantum efficiency of the sensor and the noise of the readout electronics. These limitations can be overcome by utilizing inverse Low-Gain Avalanche Diode (iLGAD) sensors with an optimized X-ray entrance window. We have developed and characterized a prototype soft X-ray iLGAD sensor bonded to the charge integrating 75 µm pixel JUNGFRAU chip. Cooled to -22°C, the system multiplication factor of the signal generated by an impinging photon is ≥ 11. With this gain, the effective equivalent noise charge of the system is ≤5.5 electrons root-mean-square at a 5 µs integration time. We show that by cooling the system below -50°C, single photon resolution at 200 eV becomes feasible with a signal-to-noise ratio better than 5. [ABSTRACT FROM AUTHOR]

Recent advances in segmented low‐gain avalanche detectors (LGADs) make them promising for the position‐sensitive detection of low‐energy X‐ray photons thanks to their internal gain. LGAD microstrip sensors fabricated by Fondazione Bruno Kessler have been investigated using X‐rays with both charge‐integrating and single‐photon‐counting readout chips developed at the Paul Scherrer Institut. In this work it is shown that the charge multiplication occurring in the sensor allows the detection of X‐rays with improved signal‐to‐noise ratio in comparison with standard silicon sensors. The application in the tender X‐ray energy range is demonstrated by the detection of the sulfur Kα and Kβ lines (2.3 and 2.46 keV) in an energy‐dispersive fluorescence spectrometer at the Swiss Light Source. Although further improvements in the segmentation and in the quantum efficiency at low energy are still necessary, this work paves the way for the development of single‐photon‐counting detectors in the soft X‐ray energy range. [ABSTRACT FROM AUTHOR]