1. Ge-on-Si and Ge-on-SOI thermo-optic phase shifters for the mid-infrared.
- Author
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Malik A, Dwivedi S, Van Landschoot L, Muneeb M, Shimura Y, Lepage G, Van Campenhout J, Vanherle W, Van Opstal T, Loo R, and Roelkens G
- Subjects
- Absorption, Radiation, Computer Simulation, Interferometry, Microscopy, Electron, Scanning, Germanium chemistry, Optical Phenomena, Silicon chemistry, Spectrophotometry, Infrared instrumentation, Temperature
- Abstract
Germanium-on-silicon thermo-optic phase shifters are demonstrated in the 5 μm wavelength range. Basic phase shifters require 700 mW of power for a 2π phase shift. The required power is brought down to 80 mW by complete undercut using focused ion beam. Finally an efficient thermo-optic phase shifter is demonstrated on the germanium on SOI platform. A tuning power (for a 2π phase shift) of 105 mW is achieved for a Ge-on-SOI structure which is lowered to 16 mW for a free standing phase shifter.
- Published
- 2014
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