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Compares zirconium and titanium germanosilicides as possible metallic contacts on SiGeC alloys in terms of phase formation and stability of the unreacted SiGeC alloy. Interactions of the metal films with the alloys; Formation of the final compound by monocrystalline grains with various orientations.

Presents information on a study which investigated the formation and structure of cobalt silicide on silicon-carbon layers grown by molecular beam epitaxy on silicon. Advantages of the incorporation of carbon atoms in the silicon lattice; Experimental details; Results and discussion; Conclusions.