1. MOSFET ESD Breakdown Modeling and Parameter Extraction in Advanced CMOS Technologies.
- Author
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Vassilev, Vessetin, Lorenzini, Martino, and Groeseneken, Guido
- Subjects
- *
METAL oxide semiconductor field-effect transistors , *COMPLEMENTARY metal oxide semiconductors , *FIELD-effect transistors , *METAL oxide semiconductors , *SEMICONDUCTORS , *DIGITAL electronics , *QUANTUM tunneling - Abstract
This paper describes an approach for modeling the breakdown and snapback behavior of state-of-the-art MOSFET structures using equivalent-circuit description. Such models are required to enable circuit-level electrostatic discharge reliability simulations, which are a major challenge for the industry nowadays. Special attention is given to accurately describing the junction and gate leakage currents due to the increased tunneling generation in the scaled-down CMOS. Consistent parameter extraction procedures for the model parameters are described as well. [ABSTRACT FROM AUTHOR]
- Published
- 2006
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