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Phase and microstructural evolution of gallium oxide (Ga2O3) films grown on vicinal (0001) sapphire substrates was investigated using a suite of analytical tools. High-resolution transmission electron microscopy and scanning transmission electron microscopy of a film grown at 530 °C revealed the initial pseudomorphic growth of three to four monolayers of α-Ga2O3, a 20–60 nm transition layer that contained both β- and γ-Ga2O3, and a top ∼700 nm-thick layer of phase-pure κ-Ga2O3. Explanations for the occurrence of these phases and their sequence of formation are presented. Additional growths of Ga2O3 films in tandem with x-ray diffraction and scanning electron microscopy investigations revealed that the top layer varied in phase composition between ∼100% κ-Ga2O3 and ∼100% β-Ga2O3; the surface microstructure ranged from poorly coalesced to completely coalesced grains as a function of growth temperature, growth rate, or diluent gas flow rate. In general, it was found that the κ-phase is favored at lower growth temperatures and higher triethylgallium flow rates (low VI/III ratios). The growth of nominally single-phase κ-Ga2O3 within the top layer was observed in a temperature range between 500 and 530 °C. Below 470 °C, only amorphous Ga2O3 was obtained; above 570 °C, only the β-phase was deposited. [ABSTRACT FROM AUTHOR]

Ga2O3 films were deposited on (100) MgAl2O4 spinel substrates at 550, 650, 750, and 850 ° C using metal-organic chemical vapor deposition and investigated using x-ray diffraction and transmission electron microscopy. A phase-pure γ-Ga2O3-based material having an inverse spinel structure was formed at 850 °C; a mixture of the γ-phase and β-Ga2O3 was detected in films grown at 750 ° C. Only β-Ga2O3 was determined in the films deposited at 650 and 550 ° C. A β- to γ-phase transition occurred from the substrate/film interface during growth at 750 ° C. The growth and stabilization of the γ-phase at the outset of film growth at 850 ° C was affected by the substantial Mg and Al chemical interdiffusion from the MgAl2O4 substrate observed in the energy-dispersive x-ray spectrum. Atomic-scale investigations via scanning transmission electron microscopy of the films grown at 750 and 850 ° C revealed a strong tetrahedral site preference for Ga and an octahedral site preference for Mg and Al. It is postulated that the occupation of these atoms in these particular sites drives the β-Ga2O3 to γ-phase transition and markedly enhances the thermal stability of the latter phase at elevated temperatures. [ABSTRACT FROM AUTHOR]

We have investigated the thermal stability of Co/Au and Ni/Au Schottky contacts to Sn-doped ( 2 ¯ 01) β-Ga2O3 substrates. Current–voltage (I–V) and capacitance–voltage (C–V) measurements were conducted after sequential annealing treatments totaling > 400 h at 300°C and > 150 h at 500°C in vacuum. For both sets of contacts, the average Schottky barrier heights (SBHs) calculated from the I–V measurements displayed no significant changes and remained within a narrow range throughout the anneals at 300°C. The SBHs calculated from the C–V measurements also remained largely constant for 300°C anneals, except for a modest increase for both contacts for anneal times > 350 h. For 500°C anneals, the I–V characteristics for Ni/Au and Co/Au contacts displayed continual degradation in the electrical behavior after 12 h and 24 h, respectively. Characterizations using scanning transmission electron microscopy, energy dispersive x-ray spectroscopy, and scanning electron microscopy of the samples annealed at 500°C revealed considerable changes in film morphology, interdiffusion, and phase segregation within the contacts. The results suggest the potential for Co/Au or Ni/Au Schottky contacts to be used in Ga2O3 devices at temperatures below, or possibly up to, 300°C, whereas higher temperatures will require modified metallization schemes. [ABSTRACT FROM AUTHOR]