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A bidimensional analysis of 6 mm hexagonal resonators is described using a double orthonormal basis set for the expansion of field quantities. The analysis takes into account the electrical voltage source and by means of a unique formalism along with a single calculation restitutes all the types of resonance whatever the thickness to width ratio value through either modal solutions or electrical impedance. An illustrative example gives the capabilities of the method to investigate spurious modes in laterally bounded resonators. [ABSTRACT FROM AUTHOR]

The Legendre polynomial method has been extended to the modeling of bulk acoustic wave (BAW) resonators. Modifications have been made to the formulation in order to account for large differences in the physical properties of adjoining layers and to take into account the electric source. A unique formalism has been obtained which allows for both harmonic and modal analyses. Resonance and antiresonance frequencies, electric input impedance, electromechanical coupling coefficients, and quality factors have been obtained for an aluminum/zinc oxide/aluminum (Al/ZnO/Al) BAW resonator. The results are in excellent agreement with analytical results. [ABSTRACT FROM AUTHOR]