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In this paper, we propose a novel, flower-like disk resonator (FDR). The structure is made up of concentrically meander-shaped rings that are interconnected by straight beams, which have the potential to provide lower resonant frequency, lower frequency split, higher quality factor (Q), and longer decay time (τ). In comparison to the traditional ring-like disk resonator (RDR), the FDR has better immunity to crystal orientation error and fabrication errors owing to its all-linear structure. The prototype of this design is manufactured by silicon on insulator fabrication technique. The frequency response test and quality factor test are implemented at room temperature and under vacuum (5 Pa) using a readout circuit with feed-through cancellation. The results show that the frequency split of the FDR is less than 7.7 Hz without electrostatic tuning. The Q and τ are 21 883 and 0.69 s, respectively. With the same structure parameters, the resonant frequency and frequency split are decreased by 39.1% and 70.2%, and the Q and τ are greatly improved by 63.8% and 172%, respectively, compared to the RDR. [ABSTRACT FROM AUTHOR]

This paper proposes a novel gear-like disk resonator (GDR). The design, fabrication, and characterization of GDR are presented. In comparison with a ring-like disk resonator (RDR), a GDR replaces the circular rings with meander-shaped rings consisting of linear beams. The finite element method (FEM) is implemented, and the simulation results show that the GDR has a much lower frequency and effective stiffness, higher quality factor (Q), and better immunity to crystal orientation error. Affected by high Q and small frequency splits, the mechanical sensitivity (Smech) is shown to increase greatly. GDR and RDR with the same structure parameters are built side-by-side on the same wafer, and prototypes are fabricated through the SOI fabrication technique. The frequency response test and ring-down test are implemented using a readout circuit under a vacuum condition (5 Pa) at room temperature. The frequency split (9.1 Hz) of the GDR is about 2.8 times smaller than that (25.8 Hz) of the RDR without electrostatic tuning. Compared with the RDR, the Q (19.2 k) and decay time constant (0.59 s) of the GDR are improved by 145% and 236%, respectively. The experimental results show great promise for the GDR being used as a gear-like disk resonator gyroscope (GDRG). [ABSTRACT FROM AUTHOR]

The mechanical sensitivity ( S mech ) is an important performance for ring-like disk resonator gyroscope (RDRG). To provide guidelines for improving S mech , the reliable expression of S mech is derived by taking into account frequency split and difference of effective mass. The design strategy indicates the main way to improve S mech is reducing effective stiffness and frequency split. Then a novel gear-like disk resonator gyroscope (GDRG) is designed by replacing circular rings of RDRG with meander-shaped rings consisting of linear beams. Afterwards, the characteristics between RDRG and GDRG are compared. For gyroscopes fabricated ideally, GDRG has a decrease of 58.40% on effective stiffness, an increase of 49.51% on quality factor (Q) and an increase of 694.28% on S mech , comparing with RDRG. For actual fabricated gyroscopes, GDRG has much less frequency split than RDRG due to its much higher immunity to crystal orientation error and fabrication errors. Affected by these errors, effective stiffness and Q have small deviations from the values of gyroscopes fabricated ideally, S mech decreases greatly and S mech of GDRG is always much higher than that of RDRG. These results have verified GDRG can achieve high S mech due to its small effective stiffness, small frequency split and high Q. The ideas and methods described in this paper can also be applied to other similar gyroscopes. [ABSTRACT FROM AUTHOR]

MEMS resonators have become core devices in many fields, their geometric designs can profoundly affect performance. However, the theoretical modeling of MEMS resonators with complex structures is becoming more and more difficult, and the time consumption of using numerical simulation methods to solve the accurate analytical solution of performance is also increasing. In this paper, we report a working mode identification and a machine learning algorithm, which dramatically shorten the MEMS design cycle by constructing datasets and predicting physical properties with high speed and high accuracy. As an example, we apply the algorithms to the performance prediction of flower-like disk resonator. The typical structural parameters of MEMS resonators are used as the input layer of the neural network, and performance generated by finite element analysis methods are used as the output layer. For 50,000 modal shapes with 5000 different structural parameters, the accuracy of the working mode identification algorithm proposed in this paper to identify elliptical modes is 100%. After sufficient training, the obtained neural network calculators can predict the resonant frequency, thermoelastic quality factor, mechanical sensitivity and mechanical thermal noise of the MEMS resonator. Compared with traditional numerical simulation methods, the identification of resonant frequency and thermoelastic quality factor is 11,341 times faster, the identification of mechanical sensitivity and mechanical thermal noise is 1813 times faster, and the prediction regression accuracy is all greater than 96%. This high-speed and high-accuracy performance prediction method can effectively improve the design efficiency of MEMS resonators with complex structures, providing a promising tool for enhancing MEMS resonator performance. [Display omitted] • HU moment invariants can be used to identify the working mode of MEMS resonators. • ML calculator can quickly predict the performance of MEMS resonator. • ML technology can improve the design efficiency of MEMS devices. [ABSTRACT FROM AUTHOR]