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Your search keyword '"Hamada, Satomi"' showing total 6 results

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Start Over You searched for: Author "Hamada, Satomi" Remove constraint Author: "Hamada, Satomi" Topic post-cmp cleaning Remove constraint Topic: post-cmp cleaning
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1. Detachment Energy Evaluation in Nano-Particle Cleaning Using Lateral Force Microscopy.

2. Nodule contact path of polyvinyl acetal roller brushes on a rotating plate and its relation to cross contamination

3. Effect of slurry particles on PVA brush contamination during post-CMP cleaning.

4. Investigations on the mechanism of silica particle removal during the Cu buff cleaning process.

5. Comparative evaluation of organic contamination sources from roller and pencil type PVA brushes during the Post-CMP cleaning process.

6. Ultrasound-induced break-in method for an incoming polyvinyl acetal (PVA) brush used during post-CMP cleaning process.

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