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This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a lower ultrasonic frequency than a PMUT with a circular, fully clamped diaphragm with the same diameter. Furthermore, the novel design was also optimised to enhance its ultrasonic radiation reception capabilities. These parametric enhancements were necessary to develop a PMUT device that could form part of an eventual microscale sensory device used for the Structural Health Monitoring (SHM) of reinforced concrete (RC) structures. Through these two enhancements, an eventual microscale sensor can be made smaller, thus taking up a smaller die footprint and also be able to be deployed further apart from each other. Eventually, this would reduce the developed distributed sensor system's cost. The innovative design employed a configuration where the diaphragm was only pinned at particular points along its circumference. This paper presents results from Finite Element Modelling (FEM), as well as experimental work that was conducted to develop and test this novel PMUT. The experimental work presented involved both laser vibrometry and ultrasonic radiation lab work. The results show that when compared to a clamped diaphragm design, the novel device managed to achieve the required reduction in resonant frequency and presented an enhanced sensitivity to incoming ultrasonic radiation. [ABSTRACT FROM AUTHOR]

Copyright of Piezoelectrics & Acoustooptics is the property of Piezoelectric & Acoustooptic and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

In this paper, we present a bolt preload monitoring system, including the system architecture and algorithms. We show how Finite Element Method (FEM) simulations aided the design and how we processed signals to achieve experimental validation. The preload is measured using a Piezoelectric Micromachined Ultrasonic Transducer (PMUT) in pulse-echo mode, by detecting the Change in Time-of-Flight (CTOF) of the acoustic wave generated by the PMUT, between no-load and load conditions. We performed FEM simulations to analyze the wave propagation inside the bolt and understand the effect of different configurations and parameters, such as transducer bandwidth, transducer position (head/tip), presence or absence of threads, as well as the frequency of the acoustic waves. In order to couple the PMUT to the bolt, a novel assembly process involving the deposition of an elastomeric acoustic impedance matching layer was developed. We achieved, for the first time with PMUTs, an experimental measure of bolt preload from the CTOF, with a good signal-to-noise ratio. Due to its low cost and small size, this system has great potential for use in the field for continuous monitoring throughout the operative life of the bolt. [ABSTRACT FROM AUTHOR]

This paper presents a Piezoelectric micromechanical ultrasonic transducer (PMUT) based on a Pt/ScAlN/Mo/SiO2/Si/SiO2/Si multilayer structure with a circular suspension film of scandium doped aluminum nitride (ScAlN). Multiphysics modeling using the finite element method and analysis of the effect of different Sc doping concentrations on the resonant frequency, the effective electromechanical coupling coefficient ( k e f f 2 ) and the station sensitivity of the PMUT cell are performed. The calculation results show that the resonant frequency of the ScAlN-based PMUT can be above 20 MHz and its k e f f 2 monotonically rise with the increasing doping concentrations in ScAlN. In comparison to the pure AlN thin film-based PMUT, the static receiving sensitivity of the PMUT based on ScAlN thin film with 35% Sc doping concentration is up to 1.61 mV/kPa. Meanwhile, the static transmitting sensitivity of the PMUT is improved by 152.95 pm/V. Furthermore, the relative pulse-echo sensitivity level of the 2 × 2 PMUT array based on the Sc doping concentration of 35% AlN film is improved by 16 dB compared with that of the cell with the same Sc concentration. The investigation results demonstrate that the performance of PMUT on the proposed structure can be tunable and enhanced by a reasonable choice of the Sc doping concentration in ScAlN films and structure optimization, which provides important guidelines for the design of PMUT for practical applications. [ABSTRACT FROM AUTHOR]

In this paper, a flexible piezoelectric micromachined ultrasonic transducer (PMUT) based on Scandium (Sc)-doped Aluminum Nitride (AlN) film was designed and modeled by the three-dimensional finite element method (3D-FEM). The resonant frequency of 218.1 kHz was reported. It was noticeable that a high effective electromechanical coupling coefficient (k2eff) of 1.45% was obtained when a combination of a flexible PI and a thin Si layer was used as the PMUT supporting structure layer. Compared with a pure Si supporting layer counterpart, the coupling coefficient had been improved by 110.68%. Additionally, the increase of Sc doping concentration in AlN film further enhanced the device electromechanical coupling coefficient and resulted in an improvement for transmitting/receiving sensitivity of the proposed flexible PMUT. When the doping concentration of Sc reached 30%, the emission sensitivity was as large as 1.721 μm/V, which was 2.86 times greater than that of conventional AlN film-based PMUT. The receiving sensitivity was found to be 2.11 V/KPa, which was as high as 1.23 times the performance of an undoped device. Furthermore, the bending simulation result showed that the proposed flexible PMUT device can maintain a good mechanical stability when the bending radius is greater than 1.5 mm. The simulation of sound field characteristics demonstrated that the flexible PMUT based on AlScN could receive stable sound pressure signals under the bending radius of 1.5 cm. [ABSTRACT FROM AUTHOR]

This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ-3db) has been reduced from 55° to 30° with a reduction of 45%, and the side lobe level signal is reduced from 147 mV to 66 mV. In addition, this work is fabricated on an eight-inch wafer. The process is compatible with standard complementary metal oxide semiconductor (CMOS), conditions are stable, and the cost is controllable, plus it facilitates the batch process. These conclusions suggest that the stepped-tube backside cavity PMUT will bring new, effective, and reliable solutions to ranging applications. [ABSTRACT FROM AUTHOR]

Copyright of Piezoelectrics & Acoustooptics is the property of Piezoelectric & Acoustooptic and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

Embedded sensors operating within a reinforced concrete structure enable the timely detection of structural degradation causes, such as chloride ions present in the pore solution. The best communication protocol to use for inter‐device communication within the concrete structure would ideally be wireless such as an ultrasonic system. Concrete is a composite material which imposes constraints on ultrasonic transmission, especially when operating at frequencies above 100kHz where incident radiation is scattered by the aggregate. Furthermore, for an effective coupling mechanism, a liquid with high acoustic impedance is required to reduce energy reflection at the interface. This paper outlines the design, construction, and characterisation of a range of Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) which are specifically designed to operate in liquids, at frequencies near or below 100kHz. The PMUT devices described in this paper have diaphragm diameters ranging between 550μm and 2,000μms which sizes are needed for PMUTs to resonate at the required low frequency. This paper outlines the device geometry calculations and the design and fabrication of the prototype devices. The resonant frequencies were determined using a laser vibrometer. [ABSTRACT FROM AUTHOR]

This paper presents a fully addressable 8 × 8 two-dimensional (2D) rigid piezoelectric micromachined ultrasonic transducer (PMUT) array. The PMUTs were fabricated on a standard silicon wafer, resulting in a low-cost solution for ultrasound imaging. A polyimide layer is used as the passive layer in the PMUT membranes on top of the active piezoelectric layer. The PMUT membranes are realized by backside deep reactive ion etching (DRIE) with an oxide etch stop. The polyimide passive layer enables high resonance frequencies that can be easily tuned by controlling the thickness of the polyimide. The fabricated PMUT with 6 µm polyimide thickness showed a 3.2 MHz in-air frequency with a 3 nm/V sensitivity. The PMUT has shown an effective coupling coefficient of 14% as calculated from the impedance analysis. An approximately 1% interelement crosstalk between the PMUT elements in one array is observed, which is at least a five-fold reduction compared to the state of the art. A pressure response of 40 Pa/V at 5 mm was measured underwater using a hydrophone while exciting a single PMUT element. A single-pulse response captured using the hydrophone suggested a 70% −6 dB fractional bandwidth for the 1.7 MHz center frequency. The demonstrated results have the potential to enable imaging and sensing applications in shallow-depth regions, subject to some optimization. [ABSTRACT FROM AUTHOR]

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors' characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene. [ABSTRACT FROM AUTHOR]

This paper presents a novel architecture for piezoelectric micromachined ultrasonic transducers (PMUT) allowing for a drastic reduction in the impact of process variations on the accuracy of the resonant frequency. At the core of this new topology is a toroidal anchoring technique. Measurement results show that inter- and intra-die resonant frequency standard variations can be reduced from 101 kHz to 23 kHz and from 20 kHz to 5.9 kHz, respectively, by using the method proposed in this paper, showcasing devices fabricated using the PiezoMUMPs commercial fabrication technology. From the 16 chips that have been fabricated, each holding 12 PMUT devices of two different topologies, resonant frequency results are presented and analyzed to assess the effectiveness of the proposed approach. In addition, as a proof of concept, the fabricated PMUT are demonstrated to perform distance ranging measurements. [2018-0132] [ABSTRACT FROM AUTHOR]

This paper presents a novel low-cost technique for the frequency tuning of piezoelectric micromachined ultrasonic transducers (PMUT). PMUT devices are fabricated using the PiezoMUMPs technology with resonance frequencies of the first and second modes at 1.4 MHz and 5 MHz, respectively. The influence of process variations on resonance frequency (with a standard deviation of about 200 kHz) motivates the need for a simple and low cost frequency tuning method. This paper proposes a technique based on a single post-processing deposition of Parylene-C. Chip-to-chip transmission and distance ranging results show that the resonant frequency of the first and second modes can accurately be tuned over a satisfactory range to significantly increase ultrasonic transmission performance. The application cases for the proposed method focus on single transducer devices or small arrays thereof since Parylene deposition simultaneously occurs on all elements of a chip and results in a uniform frequency tuning of all exposed elements. [2017–0276] [ABSTRACT FROM AUTHOR]

The objective of this article is to review the recent advancement in piezoelectric micromachined ultrasound transducer (PMUT) technology and the associated piezoelectric materials, device fabrication and characterization, as well as applications. PMUT has been an active research topic since the late 1990s because of the ultrasound application needs of low cost large 2D arrays, and the promising progresses on piezoelectric thin films, semiconductors, and micro/nano-electromechanical system technology. However, the industrial and medical applications of PMUTs have not been very significant until the recent success of PMUT based fingerprint sensing, which inspired growing interests in PMUT research and development. In this paper, recent advances of piezoelectric materials for PMUTs are reviewed first by analyzing the material properties and their suitability for PMUTs. PMUT structures and the associated micromachining processes are next reviewed with a focus on the complementary metal oxide semiconductor compatibility. PMUT prototypes and their applications over the last decade are then summarized to show the development trend of PMUTs. Finally, the prospective future of PMUTs is discussed as well as the challenges on piezoelectric materials, micro/nanofabrication and device integration. [ABSTRACT FROM AUTHOR]

This paper presents a novel bimorph Piezoelectric Micromachined Ultrasonic Transducer (PMUT) fabricated with 8-inch standard CMOS-compatible processes. The bimorph structure consists of two layers of 20% scandium-doped aluminum nitride (Sc0.2Al0.8N) thin films, which are sandwiched among three molybdenum (Mo) layers. All three Mo layers are segmented to form the outer ring and inner plate electrodes. Both top and bottom electrodes on the outer ring are electrically linked to the center inner plate electrodes. Likewise, the top and bottom center plate electrodes are electrically connected to the outer ring in the same fashion. This electrical configuration maximizes the effective area of the given PMUT design and improves efficiency during the electromechanical coupling process. In addition, the proposed bimorph structure further simplifies the device's electrical layout with only two-terminal connections as reported in many conventional unimorph PMUTs. The mechanical and acoustic measurements are conducted to verify the device's performance improvement. The dynamic mechanical displacement and acoustic output under a low driving voltage (1 Vpp) are more than twice that reported from conventional unimorph devices with a similar resonant frequency. Moreover, the pulse-echo experiments indicate an improved receiving voltage of 10 mV in comparison with the unimorph counterpart (4.8 mV). The validation of device advancement in the electromechanical coupling effect by using highly doped ScAlN thin film, the realization of the proposed bimorph PMUT on an 8-inch wafer paves the path to production of next generation, high-performance piezoelectric MEMS. [ABSTRACT FROM AUTHOR]

Piezoelectric micromachined ultrasonic transducers (PMUTs) have been widely applied in distance sensing. However, the sensing distance of currently reported miniaturized ultrasonic sensors (e.g., PMUTs or CMUT) is still limited up to a certain range (e.g., ≤5 m) compared to conventional bulk ultrasonic devices. This paper reports a PMUT array design using scandium-doped aluminum nitride (AlScN) as its piezoelectric layer for an extended long-range detection purpose. To minimize air attenuation, our device is resonating at 66 kHz for a high receive sensitivity of 5.7 mV/Pa. The proposed PMUT array can generate a sound pressure level (SPL) as high as 120 dB at a distance of 10 cm without beam forming. This PMUT design is catered for a pin-to-pin replacement of the current commercial bulk ultrasonic ranging sensor and works directly with the conventional range finding system (e.g., TI PGA460). In comparison with the common bulk transducer, the size of our device is 80% smaller. With the identical ranging detection setup, the proposed PMUT array improves the system SNR by more than 5 dB even at a distance as far as 6.8 m. The result of extended sensing distance validates our miniaturized PMUT array as the optimized candidate for most ultrasonic ranging applications. With the progressive development of piezoelectric MEMS, we believe that the PMUT technology could be a game changer in future long-range sensing applications. [ABSTRACT FROM AUTHOR]

Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely used for ultrasound imaging and sensing applications that require broad bandwidth. A single PMUT is normally smaller than its wavelength and, therefore has small acoustic impedance and bandwidth. To make PMUTs broadband and desirable for advanced applications, this paper demonstrates equivalent circuit and finite element method (FEM) modeling results of mutual acoustic impedance impact on the frequency and bandwidth of an element including a group of PMUTs in parallel connection. The equivalent circuit analysis was shown to be a computing-efficient method with good agreement with FEM simulation results. To maximize bandwidth, various PMUT elements with different diaphragm numbers and pitches were designed, fabricated, characterized, and optimized to be 3×3 and 82 μm, respectively. The PMUT element with a center frequency of 6.5 MHz and a −6 dB fractional bandwidth of 107.6 % was demonstrated, compared to 6 MHz center frequency and 32.5 % fractional bandwidth for 1×1 and 7.8 MHz center frequency and 60.7 % fractional bandwidth for 8×8. Meanwhile, the optimized PMUT element shows a high transmitting performance of 195 Pa/V at 2 cm away from the element. [Display omitted] • This paper demonstrates equivalent circuit and finite element method simulation results of mutual acoustic impedance impact on PMUT elements' bandwidth and frequency with good agreement. • To maximize bandwidth, various membrane numbers and pitches of PMUT elements were studied and optimized to be 3×3 and 82 μm, respectively, via a computing-efficient method which was verified by FEM simulation and measurement results. • Based on systemic studies of mutual acoustic radiation effect, the optimized PMUT element with a center frequency of 6.5 MHz was fabricated and characterized, showing the transmitting performance of 195 Pa/V at 2 cm away and the fractional bandwidth of 107.6 % with a small footprint of 0.0557 mm2, which makes it ideal for miniature 2D phased array applications. [ABSTRACT FROM AUTHOR]

This paper introduces a novel design for a liquid-deployed Piezoelectric Micromachined Ultrasonic Transducer (PMUT). This design was specifically developed to resonate at a lower ultrasonic frequency than a PMUT with a circular, fully clamped diaphragm with the same diameter. Furthermore, the novel design was also optimised to enhance its ultrasonic radiation reception capabilities. These parametric enhancements were necessary to develop a PMUT device that could form part of an eventual microscale sensory device used for the Structural Health Monitoring (SHM) of reinforced concrete (RC) structures. Through these two enhancements, an eventual microscale sensor can be made smaller, thus taking up a smaller die footprint and also be able to be deployed further apart from each other. Eventually, this would reduce the developed distributed sensor system’s cost. The innovative design employed a configuration where the diaphragm was only pinned at particular points along its circumference. This paper presents results from Finite Element Modelling (FEM), as well as experimental work that was conducted to develop and test this novel PMUT. The experimental work presented involved both laser vibrometry and ultrasonic radiation lab work. The results show that when compared to a clamped diaphragm design, the novel device managed to achieve the required reduction in resonant frequency and presented an enhanced sensitivity to incoming ultrasonic radiation.

Ultrasound is widely used in industry and the agricultural, biomedical, military, and other fields. As key components in ultrasonic applications, the characteristic parameters of ultrasonic transducers fundamentally determine the performance of ultrasonic systems. High-frequency ultrasonic transducers are small in size and require high precision, which puts forward higher requirements for sensor design, material selection, and processing methods. In this paper, a three-dimensional model of a high-frequency piezoelectric micromachined ultrasonic transducer (PMUT) is established based on the finite element method (FEM). This 3D model consists of a substrate, a silicon device layer, and a molybdenum-aluminum nitride-molybdenum (Mo-AlN-Mo) sandwich piezoelectric layer. The effect of the shape of the transducer's vibrating membrane on the transmission performance was studied. Through a discussion of the parametric scanning of the key dimensions of the diaphragms of the three structures, it was concluded that the fundamental resonance frequency of the hexagonal diaphragm was higher than that of the circle and the square under the same size. Compared with the circular diaphragm, the sensitivity of the square diaphragm increased by 8.5%, and the sensitivity of the hexagonal diaphragm increased by 10.7%. The maximum emission sound-pressure level of the hexagonal diaphragm was 6.6 times higher than that of the circular diaphragm. The finite element results show that the hexagonal diaphragm design has great advantages for improving the transmission performance of the high-frequency PMUT. [ABSTRACT FROM AUTHOR]

In this paper, we report an air-coupled piezoelectric ultrasonic micromachined transducer (PMUT) using a lead-zirconate-titanate (PZT) piezoelectric layer. A dc bias voltage applied to the PZT film controls its polarization and intrinsic stress, tuning the frequencies of two closely-spaced resonance modes of the rectangular shaped PMUT. At an optimal bias voltage of approximately 5 V, the modes nearly overlap at 230 kHz, increasing the bandwidth by a factor of 8 relative to the zero dc biased state. Measurements of the electromechanical coupling coefficient of the PZT film show that it is maximized at 5-6 V, agreeing with device performance experiments. Acoustic transmission and reception were demonstrated using two identical PMUTs by adding the optimum dc bias of 6 V to the 1.4 V peak-to-peak ac voltage which is maximum within the linear displacement regime. The signal detectable range of the transmit and receive measurement with optimum dc bias tuning was 4 cm to 19 cm in air. [2017-0223] [ABSTRACT FROM PUBLISHER]

This paper is conducted to design, fabricate, and characterize a novel high-density large-scale ultrasonic transducer, which is based on a 64\times 4 array of 0.753 MHz piezoelectric micromachined ultrasonic transducer (pMUT) with 100~\mu \text{m} size and 120~\mu \text{m}$ pitch. The fill factor of the array is 69.4%, which is higher than the other arrays in reports. Sol-gel method with layer-by-layer annealing is used to fabricate isolated piezoelectric lead zirconate titanate elements into a piezoelectric layer. The membrane of the pMUT is released by backside deep silicon etching. The impedance-frequency spectrum of a $4\times 5$ subarray of the transducers is characterized by HP 4294A impedance phase analyzer. As a result, the mean value resonant frequency is 0.753 MHz, in reasonable agreement with COMSOL Multiphysics simulation results. And the array shows good uniformity in resonant frequency. The equivalent circuit of the transducer is extracted from the spectrum and the admittance circle deduced from the circuit is in accordance with experimental data. The results show that the present array has a good application prospect on ultrasonic imaging. [ABSTRACT FROM PUBLISHER]

This paper reports a bimorph pinned piezoelectric micromachined ultrasonic transducer (PMUT) for enhanced sound pressure output and electromechanical coupling factor for space imaging applications. An equivalent circuit model has been built to analyze the dynamic behavior of PMUTs and prototype devices have been designed, fabricated. Experimental results show a 58% measured increase in the electromechanical coupling factor and pulse-echo measurements show a 4-meter traveling distance in air under a 133 kHz driving frequency. As a demonstration example, a relatively long-distance (> 1.5 meters) ultrasound imaging test in air is conducted using a 4 × 4 bimorph, pinned dual-electrode PMUTs array based on the transmission beamforming scheme. As such, this work enhances and extends the PMUT performances and capabilities for potential broad applications. [2021-0102] [ABSTRACT FROM AUTHOR]

This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40–50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8–1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enables a high piezoelectric coefficient (${e} _{31, f} \approx ~16$ - 24 C/ $\text{m}^{{2}}$), and a low dielectric constant ($\varepsilon _{\mathrm {r}}~\approx ~308$), achieving high PMUT transceiver efficiency. The $2\times 2$ PMUT array achieves a very high sound pressure level (SPL) output of 109.4 dB at 26 cm distance. Different from conventional PZT PMUTs, this study utilized single-crystal PZT with a low permittivity to achieve a good acoustic reception, demonstrating the sensitivity of 2 mV/Pa. This work reports the PMUT design, modeling, fabrication, characterization, enabling a long-range detection of 4.8 meters in a pulse-echo experiment, which was conducted by a pair of $2\times 2$ PMUT arrays with the matched resonances. [2020-0270] [ABSTRACT FROM AUTHOR]

This paper reports the approach to boost the acoustic performances of PMUTs (Piezoelectric Micromachined Ultrasonic Transducers) including vibrational amplitude, acoustic pressure and electromechanical coupling by using the pinning boundary structure. An analytical model is developed based on an assumed mode shape and is validated with matching results from numerical simulations. Prototyped devices are fabricated and tested with a measured 2.5X improvement in displacement and 3.5X higher pressure output per volt at resonance as compared to those of PMUTs with clamped boundary. As a demonstration example, a PMUT-based ultrasonic tilt sensor is investigated with measured result using the receiving PMUT’s pressure amplitude for a tilting range of ±8 degrees and an error of ±0.7 degrees. [2020-0152] [ABSTRACT FROM AUTHOR]

In this paper, we present a novel piezoelectric micromachined ultrasonic transducer (PMUT) array with a high fill factor and a large quality factor (Q). With the reusable design of etching holes, the pitch between PMUTs is effectively minimized, improving the fill factor of the array. With a newly developed surface micromachining process, the fabricated PMUT array only needs few etching holes to release the structure, and all sealed etching holes are removed from the resonance region, achieving a large Q. The demonstrated process facilitates low-cost volume manufacturing. As a result, a 50 × 50 PMUT array containing 48-µm-diameter PMUTs with a 52 µm pitch achieves a high fill factor of 67%. For an individual PMUT, a large Q of 351 is achieved at a center frequency of 12.62 MHz, the peak displacement is 3.25 nm/V, and the effective electromechanical coupling coefficient is 1.6%. The achieved high fill factor and large Q render the proposed PMUT array promising in applications such as flow sensing, chemical detection, and energy transmission. [ABSTRACT FROM AUTHOR]

In this paper multi-frequency piezoelectric MEMS ultrasonic transducers (pMUTs) are designed, characterized and tested for nondestructive evaluation (NDE) of solids. The transducers operate in flexural mode, and are tuned to three different frequencies namely 1 MHz, 1.5 MHz and 2 MHz. The microstructural layers consist of aluminum nitride (AlN) as an active sensing layer sandwiched between metal and doped silicon electrodes. pMUTs are designed with octagonal and circular membranes. The vibration of silicon membrane assists piezoelectric element to convert energies. The transducers are modeled numerically to obtain their dynamic characteristics. Piezoelectric Multi-User MEMS Processes (PiezoMUMPs) are utilized to manufacture pMUTs. The electromechanical characterization shows that the circular design has higher figure of merit as compared to the octagonal design due to more uniform stress distribution transferred between silicon and AlN layers. It is demonstrated that the piezeoelectric layer should be deposited up to the inflection point of diaphragm deformation. This avoids the signal cancellation due to opposite polarization. The performance of pMUTs as receiver is evaluated to detect the creep damage by implementing nonlinear ultrasonic testing (NLUT). NLUT is based on detecting higher harmonics in solids due to heterogeneity in materials. Significant amplification in the second harmonics is obtained due to highly narrowband and low damping characteristics of pMUTs that improves the resolution of NLUT to detect subwavelength damage. Higher harmonics can be detected using small footprint pMUT device, which is not possible with conventional piezoelectric transducers. This allows better spatial resolution of nonlinear measurement. [ABSTRACT FROM AUTHOR]

This paper presents high fill-factor piezoelectric micromachined ultrasonic transducer (PMUT) arrays fabricated via a novel process using cavity SOI wafers. The simple three-mask fabrication process enables smaller diameter PMUTs (25 $\mu $ m) and finer pitch than previous processes requiring through-wafer etching. PMUTs were fabricated with diameters from 25 to 50 \mu $ m, resulting in center frequencies from 13 to 55 MHz in air. Two types of devices, having different piezoelectric layers, lead zirconium titanate (PZT), and aluminum nitride (AlN), were fabricated and characterized. Comparing 50- \mu $ m diameter devices, the PZT PMUTs show large dynamic displacement sensitivity of 316 nm/V at 11 MHz in air, which is \sim 20\times % and 50- \Omega $ electrical impedance that is well-matched to typical interface circuits. Immersion tests were conducted on PZT PMUT arrays. The fluid-immersed acoustic pressure generated by an unfocused 9\times 9$ array of 40- \mu input. Beam forming based on electronic phase control produced a narrow, 150- \mu $ m diameter, focused beam over a depth of focus >0.2 mm and increased the pressure to 450 kPa with 18 V_{\mathrm {pp}} input. [2014-0324] [ABSTRACT FROM PUBLISHER]

Copyright of Piezoelectrics & Acoustooptics is the property of Piezoelectric & Acoustooptic and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer of AlN piezoelectrical material and Si3N4 as a passive layer, as is studied here with finite element modeling (FEM) simulations and experimental characterization. Due to the thin layers used, parameters such as residual stress become relevant as they produce a buckled structure. It has been reported that the buckling of the membrane due to residual stress, in general, reduces the coupling factor and consequently degrades the efficiency of the acoustic pressure production. In this paper, we show that this buckling can be beneficial and that the fabricated PMUTs exhibit enhanced performance depending on the placement of the electrodes. This behavior was demonstrated experimentally and through FEM. The acoustic characterization of the fabricated PMUTs shows the enhancement of the PMUT performance as a transmitter (with 5 kPa V−1 surface pressure for a single PMUT) and as a receiver (12.5 V MPa−1) in comparison with previously reported devices using the same MEMS-on-CMOS technology as well as state-of-the-art devices. [ABSTRACT FROM AUTHOR]

Ultrasonic wireless power transfer technology (UWPT) represents a key technology employed for energizing implantable medical devices (IMDs). In recent years, aluminum nitride (AlN) has gained significant attention due to its biocompatibility and compatibility with complementary metal-oxide-semiconductor (CMOS) technology. In the meantime, the integration of scandium-doped aluminum nitride (Al90.4%Sc9.6%N) is an effective solution to address the sensitivity limitations of AlN material for both receiving and transmission capabilities. This study focuses on developing a miniaturized UWPT receiver device based on AlScN piezoelectric micro-electromechanical transducers (PMUTs). The proposed receiver features a PMUT array of 2.8 × 2.8 mm2 comprising 13 × 13 square elements. An acoustic matching gel is applied to address acoustic impedance mismatch when operating in liquid environments. Experimental evaluations in deionized water demonstrated that the power transfer efficiency (PTE) is up to 2.33%. The back-end signal processing circuitry includes voltage-doubling rectification, energy storage, and voltage regulation conversion sections, which effectively transform the generated AC signal into a stable 3.3 V DC voltage output and successfully light a commercial LED. This research extends the scope of wireless charging applications and paves the way for further device miniaturization by integrating all system components into a single chip in future implementations. [ABSTRACT FROM AUTHOR]

This paper reports a low-frequency piezoelectric micromachined ultrasonic transducer (pMUT) with a small attenuation coefficient to realize the long-distance range finding applications in air. Pulse-detection measurements of one pair of pMUT devices show a >6-meter traveling distance in air under a 37.32 kHz driving frequency. As an example, two pMUT chips are mounted on two drones as the transceiver and receiver, respectively. Measurements of the separation distance are conducted based on the time-of-flight (ToF) principle with up to 32 fps (frames per second) for real-time detections. This demo of drone-mounted pMUT system illustrates the advantages of pMUT in terms of compactness and low power consumption for applications in drones including obstacle avoidance, inter collision prevention, aerial coordination, and acoustic-based vision.

In this paper, guidelines for the optimization of piezoelectrical micromachined ultrasound transducers (PMUTs) monolithically integrated over a CMOS technology are developed. Higher acoustic pressure is produced by PMUTs with a thin layer of AlN piezoelectrical material and Si3N4 as a passive layer, as is studied here with finite element modeling (FEM) simulations and experimental characterization. Due to the thin layers used, parameters such as residual stress become relevant as they produce a buckled structure. It has been reported that the buckling of the membrane due to residual stress, in general, reduces the coupling factor and consequently degrades the efficiency of the acoustic pressure production. In this paper, we show that this buckling can be beneficial and that the fabricated PMUTs exhibit enhanced performance depending on the placement of the electrodes. This behavior was demonstrated experimentally and through FEM. The acoustic characterization of the fabricated PMUTs shows the enhancement of the PMUT performance as a transmitter (with 5 kPa V−1 surface pressure for a single PMUT) and as a receiver (12.5 V MPa−1) in comparison with previously reported devices using the same MEMS-on-CMOS technology as well as state-of-the-art devices.

Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent years, both in terms of performance and scope of applications within the biomedical ultrasound domain. This paper presents a review of the state-of-the-art of PMUT and CMUT technologies, focusing on their principle of operation, microfabrication techniques and use in different biomedical imaging and therapeutic applications. The advantages and drawbacks of PMUT and CMUT technologies in comparison with conventional bulk transducers are highlighted, the trade-offs among PMUTs and CMUTs are discussed, and their relevance in the current landscape of medical diagnostics and therapeutic uses is outlined, thus providing a clear overview of these promising technologies for the present and the next generation biomedical ultrasound applications.

Piezoelectric Micromachined Ultrasonic Transducer (PMUT) is a microelectromechanical system (MEMS). Unlike bulk piezoelectric transducers which use the thickness mode motion of a plate of piezoelectric ceramic, PMUT are based on the flexural motion of a thin membrane coupled with a thin piezoelectric film. The paper offers algorithm for simulation design of PMUT sensor with high level of detail. It is intended for students, professors and designers. The design of experiment (DoE) includes application of theory for: PMUT, Amplifier, Schmitt-trigger, SR-trigger, sample-and-hold scheme, analog-to-digital converter, controller and RF-transmitter. The methodology belongs to edge computing. With the chosen detail level, the algorithm is a good base for design of network element in IoI-environment. [ABSTRACT FROM AUTHOR]

This paper presents design method and fabrication process of novel devices which were used in the microelectromechanical systems based ultrasonic ranging system. An acoustical transducer microarray operating in d31 mode which can offer strong directionality with a high radiation acoustic power has been developed to enhance the spatial resolution in the pulse-echo measurement in air while an acoustical transducer operating in d33 mode which has a high isotropic receive sensitivity has been designed to expand the system detection range. The proposed devices based on novel ferroelectric thin film has excellent performance, miniature size and high reliability, and could be fabricated with conventional integrated circuit process. [ABSTRACT FROM AUTHOR]

A complete model was developed to simulate the behavior of a circular clamped axisymmetric fluid-coupled Piezoelectric Micromachined Ultrasonic Transducer (PMUT). Combining Finite Difference and Boundary Element Matrix (FD-BEM), this model is based on the discretization of the partial differential equation used to translate the mechanical behavior of a PMUT. In the model, both the axial and the transverse displacements are preserved in the equation of motion and used to properly define the neutral line position. To introduce fluid coupling, a Green's function dedicated to axisymmetric circular radiating sources is employed. The resolution of the behavioral equations is used to establish the equivalent electroacoustic circuit of a PMUT that preserves the average particular velocity, the mechanical power, and the acoustic power. Particular consideration is given to verifying the validity of certain assumptions that are usually made across various steps of previously reported analytical models. In this framework, the advantages of the membrane discretization performed in the FD-BEM model are highlighted through accurate simulations of the first vibration mode and especially the cutoff frequency that many other models do not predict. This high cutoff frequency corresponds to cases where the spatial average velocity of the plate is null and is of great importance for PMUT design because it defines the upper limit above which the device is considered to be mechanically blocked. These modeling results are compared with electrical and dynamic membrane displacement measurements of AlN-based (500 nm thick) PMUTs in air and fluid. The first resonance frequency confrontation showed a maximum relative error of 1.13% between the FD model and Finite Element Method (FEM). Moreover, the model perfectly predicts displacement amplitudes when PMUT vibrates in a fluid, with less than 5% relative error. Displacement amplitudes of 16 nm and 20 nm were measured for PMUT with 340 µm and 275 µm diameters, respectively. This complete PMUT model using the FD-BEM approach is shown to be very efficient in terms of computation time and accuracy. [ABSTRACT FROM AUTHOR]

Ultrasonic systems driven by multi-frequency continuous waves (MFCW) have been used for range distance measurement, offering high accuracy in long and medium range distance estimation. However, the use of continuous waves in very short-distance measurements causes large errors due to multipath reflections. This paper presents a new strategy to estimate very short relative distances with high accuracy based on the use of multi-frequency pulsed waves (MFPW). The proposed strategy allows to avoid the multipath reflections that appear when continuous waves are used, and it improves the achieved accuracy compared to the original MFCW method. To validate it, an 80 µm square AlScN piezoelectric micromachined ultrasonic transducer (PMUT) was chosen as a transmitter while a hydrophone was utilized as a target and receiver, immersed in fluorinert (FC-70) as a propagation medium. Three independent and consecutive tone-burst signals were transmitted successively. The selected frequencies are f1 = 2.3962 MHz, f2 = 2.327 MHz and f3 = 2.1195 MHz, giving first and second-order resolutions of 6.88 and 0.79 µm/°, respectively. Experimental results show a ±6.2 μm measured range error in a range of 3.5 mm, and therefore it represents a good candidate for ultrasound micro-profilometer applications under liquid operation. [ABSTRACT FROM AUTHOR]

Piezoelectric micromachined ultrasonic transducers (PMUT) are promising elements to fabricate a two-dimensional (2D) array with a pitch small enough (approximately half wavelength) to form and receive arbitrary acoustic beams for medical imaging. However, PMUT arrays have so far failed to combine the wide, high-frequency bandwidth needed to achieve a high axial resolution. In this paper, a polydimethylsiloxane (PDMS) backing structure is introduced into the PMUTs to improve the device bandwidth while keeping a sub-wavelength (λ) pitch. We implement this backing on a 16 × 8 array with 75 µm pitch (3λ/4) with a 15 MHz working frequency. Adding the backing nearly doubles the bandwidth to 92% (−6 dB) and has little influence on the impulse response sensitivity. By widening the transducer bandwidth, this backing may enable using PMUT ultrasonic arrays for high-resolution 3D imaging. [ABSTRACT FROM AUTHOR]

This research paper presents a comprehensive methodology for the efficient modeling of piezoelectric micromachined ultrasonic transducers (PMUTs) using a combination of finite and lumped element models. A single membrane is first studied in air with an eigenfrequency study in order to calibrate the lumped element model on the finite element model. From this electrical equivalent circuit, a complete model of the PMUT cell composed of numerous membranes is developed using the propagation, directivity, absorption, mutual and self-impedances, and variability of the resonance frequencies due to manufacturing discrepancies. The calculated acoustic response of the PMUT is then compared with a measured response, in water. The relatively good agreement between the simulation and the measurement, as well as the very low computation time, makes this approach relevant for further optimization of the PMUT design to target larger bandwidth and higher sensitivity.

This paper presents an analog front-end transceiver for an ultrasound imaging system based on a high-voltage (HV) transmitter, a low-noise front-end amplifier (RX), and a complementary-metal-oxide-semiconductor, aluminum nitride, piezoelectric micromachined ultrasonic transducer (CMOS-AlN-PMUT). The system was designed using the 0.13-μm Silterra CMOS process and the MEMS-on-CMOS platform, which allowed for the implementation of an AlN PMUT on top of the CMOS-integrated circuit. The HV transmitter drives a column of six 80-μm-square PMUTs excited with 32 V in order to generate enough acoustic pressure at a 2.1-mm axial distance. On the reception side, another six 80-μm-square PMUT columns convert the received echo into an electric charge that is amplified by the receiver front-end amplifier. A comparative analysis between a voltage front-end amplifier (VA) based on capacitive integration and a charge-sensitive front-end amplifier (CSA) is presented. Electrical and acoustic experiments successfully demonstrated the functionality of the designed low-power analog front-end circuitry, which outperformed a state-of-the art front-end application-specific integrated circuit (ASIC) in terms of power consumption, noise performance, and area. [ABSTRACT FROM AUTHOR]

Piezoelectric micromachined ultrasonic transducers (pMUTs) are of great interest for numerous applications, including fingerprint imaging, precise acoustic sensing, and ultrasonic medical imaging, due to their properties of high design freedom and low power consumption when miniaturized for a transducer array. However, micromachined transducers tend to have relatively low acoustic intensity compared with conventional ceramic-based transducers. Therefore, it is preferable and recommended to achieve high acoustic intensity and enhanced displacement of the pMUTs. This paper presents circular pMUTs with various clamped membranes and explores the displacement and mode shape of membranes at resonance frequencies that are critical for enhanced acoustic intensity. Each circular clamped membrane had four etched holes at the edge of the membrane to control the boundary condition, which affected the resonance frequencies and membrane displacement by controlling the effective stiffness. The displacement and effective area as a function of etching hole size were simulated using COMSOL software and verified experimentally. The maximum displacement of a membrane 60 µm in diameter exhibited a 25% improvement when the etching hole angle was 20° compared with the fully clamped membrane. The effective area for acoustic intensity increased from 54.2% to 61.7% at 60° when the mode shape changed from circular to square. The experimental and simulation results were in reasonable agreement, and the results helped clarify how the geometric design of the suspended membrane of the pMUT affects its vibrational characteristics. [Display omitted] • Piezoelectric micromachined ultrasonic transducers (pMUTs) with various etching holes were fabricated using surface micromachining. • The circular and fin-shaped etching holes were used to modify the boundary conditions of the pMUT membrane. • The experimental results for the effect of etching holes on vibrational characteristics agree with the COMSOL simulation results. • The various design of the etching hole provides a method to increase the output pressure of pMUT for ultrasonic application. [ABSTRACT FROM AUTHOR]

Piezoelectric micromachined ultrasonic transducer (pMUT) rangefinders have been rapidly developed in the last decade. With high output pressure to enable long-range detection and low power consumption (16 μW for over 1 m range detection has been reported), pMUT rangefinders have drawn extensive attention to mobile range-finding. pMUT rangefinders with different strategies to enhance range-finding performance have been developed, including the utilization of pMUT arrays, advanced device structures, and novel piezoelectric materials, and the improvements of range-finding methods. This work briefly introduces the working principle of pMUT rangefinders and then provides an extensive overview of recent advancements that improve the performance of pMUT rangefinders, including advanced pMUT devices and range-finding methods used in pMUT rangefinder systems. Finally, several derivative systems of pMUT rangefinders enabling pMUT rangefinders for broader applications are presented. [ABSTRACT FROM AUTHOR]

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This paper presents a novel piezoelectric micromachined ultrasonic transducer (PMUT) with theoretical simulation, fabrication, and testing. Conventional methods using a PCB or an external horn to adjust the PMUT acoustic field angle are limited by the need for transducer size. To address this limitation, the stepped-tube (expanded tube) backside cavity PMUT has been proposed. The stepped-tube PMUT and the tube PMUT devices have the same membrane structure, and the acoustic impedance matching of the PMUT is optimized by modifying the boundary conditions of the back cavity structure. The acoustic comparison experiments show that the average output sound pressure of the stepped-tube backside cavity PMUT has increased by 17%, the half-power-beam-width (θ-3db) has been reduced from 55° to 30° with a reduction of 45%, and the side lobe level signal is reduced from 147 mV to 66 mV. In addition, this work is fabricated on an eight-inch wafer. The process is compatible with standard complementary metal oxide semiconductor (CMOS), conditions are stable, and the cost is controllable, plus it facilitates the batch process. These conclusions suggest that the stepped-tube backside cavity PMUT will bring new, effective, and reliable solutions to ranging applications.

This paper presents three-dimensional (3D) models of high-frequency piezoelectric micromachined ultrasonic transducers (PMUTs) based on the finite element method (FEM). These models are verified with fabricated aluminum nitride (AlN)-based PMUT arrays. The 3D numerical model consists of a sandwiched piezoelectric structure, a silicon passive layer, and a silicon substrate with a cavity. Two types of parameters are simulated with periodic boundary conditions: (1) the resonant frequencies and mode shapes of PMUT, and (2) the electrical impedance and acoustic field of PMUT loaded with air and water. The resonant frequencies and mode shapes of an electrically connected PMUT array are obtained with a laser Doppler vibrometer (LDV). The first resonant frequency difference between 3D FEM simulation and the measurement for a 16-MHz PMUT is reasonably within 6%, which is just one-third of that between the analytical method and the measurement. The electrical impedance of the PMUT array measured in air and water is consistent with the simulation results. The 3D model is suitable for predicting electrical and acoustic performance and, thus, optimizing the structure of high-frequency PMUTs. It also has good potential to analyze the transmission and reception performances of a PMUT array for future compact ultrasonic systems. [ABSTRACT FROM AUTHOR]

This paper presents a Piezoelectric micromechanical ultrasonic transducer (PMUT) based on a Pt/ScAlN/Mo/SiO2/Si/SiO2/Si multilayer structure with a circular suspension film of scandium doped aluminum nitride (ScAlN). Multiphysics modeling using the finite element method and analysis of the effect of different Sc doping concentrations on the resonant frequency, the effective electromechanical coupling coefficient (keff2) and the station sensitivity of the PMUT cell are performed. The calculation results show that the resonant frequency of the ScAlN-based PMUT can be above 20 MHz and its keff2 monotonically rise with the increasing doping concentrations in ScAlN. In comparison to the pure AlN thin film-based PMUT, the static receiving sensitivity of the PMUT based on ScAlN thin film with 35% Sc doping concentration is up to 1.61 mV/kPa. Meanwhile, the static transmitting sensitivity of the PMUT is improved by 152.95 pm/V. Furthermore, the relative pulse-echo sensitivity level of the 2 × 2 PMUT array based on the Sc doping concentration of 35% AlN film is improved by 16 dB compared with that of the cell with the same Sc concentration. The investigation results demonstrate that the performance of PMUT on the proposed structure can be tunable and enhanced by a reasonable choice of the Sc doping concentration in ScAlN films and structure optimization, which provides important guidelines for the design of PMUT for practical applications.