1. Formation and study of p-i-n structures based on two-phase hydrogenated silicon with a germanium layer in the i-type region.
- Author
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Krivyakin, G., Volodin, V., Shklyaev, A., Mortet, V., More-Chevalier, J., Ashcheulov, P., Remes, Z., Stuchliková, T., and Stuchlik, J.
- Subjects
CRYSTAL structure ,SILICON ,GERMANIUM ,POLYMORPHISM (Crystallography) ,PLASMA-enhanced chemical vapor deposition ,CRYSTAL growth - Abstract
Four pairs of p-i-n structures based on polymorphous Si:H ( pm-Si:H) are fabricated by the method of plasma-enhanced chemical vapor deposition. The structures in each pair are grown on the same substrate so that one of them does not contain Ge in the i-type layer while the other structure contains Ge deposited by molecular-beam epitaxy as a layer with a thickness of 10 nm. The pair differ from one another in terms of the substrate temperature during Ge deposition; these temperatures are 300, 350, 400, and 450°C. The data of electron microscopy show that the structures formed at 300°C contain Ge nanocrystals ( nc-Ge) nucleated at nanocrystalline inclusions at the pm-Si:H surface. The nc-Ge concentration increases as the temperature is raised. The study of the current-voltage characteristics show that the presence of Ge in the i-type layer decreases the density of the short-circuit current in p-i-n structures when they are used as solar cells, whereas these layers give rise to an increase in current at a reverse bias under illumination. The obtained results are consistent with known data for structures with Ge clusters in Si; according to these data, Ge clusters increase the coefficient of light absorption but they also increase the rate of charge-carrier recombination. [ABSTRACT FROM AUTHOR]
- Published
- 2017
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