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Abstract: A local high pressure micro plasma jet was proposed for micro scale local sputter etching in a vacuum system. A small orifice gas nozzle as an anode was placed in a Scanning Electron Microscope (SEM) chamber to produce the local high gas pressure and supply Argon gas for DC plasma generation at a short gap distance. The characteristics of local sputter etching by the micro plasma jet were studied. At DC power of 1.68 mW, a silicon sputtering rate of approximately 0.01 μm/s was achieved by using an orifice 40 μm in diameter at 2.5 sccm gas flow rate and 100 μm gap distance. The sputtered area was 60 μm in diameter. [Copyright &y& Elsevier]

An atmospheric micro plasma is generated in micro gap electrodes with a dielectric barrier. Discharge voltage is only around 1 kV, although the electrode gap is less than 100 µm. Ozone is generated through the micro plasma electrode, which removes indoor air pollutants such as formaldehyde and nitric oxides. By making the micro gap between dielectric barrier electrodes smaller, a higher ozone concentration could be obtained. [ABSTRACT FROM AUTHOR]

In open air and without any type of inert gas, stable and bright micro plasma was successfully obtained using Liquid Sampling Atmospheric Pressure Glow Discharge (LS-APGD). The discharge current varied between 20 to 80 mA with a maximum voltage 550 V, discharge gap 0.5–2 mm and solution pH of 1. The produced plasma operates in the normal glow discharge region at a low power (11–40 W). For analytical application the linear dynamic range is obtained up to 500 µg mL−1. Limits of detection based on 3σ of the background intensity determined for Ca I (422.673 nm), Cu I (324.754 nm), Fe I (497.5 nm), and Zn I (213.856 nm) are 0.3, 0.65, 0.1, 0.7 µg mL−1 respectively. [ABSTRACT FROM AUTHOR]

For the last couple of years we have been studying 2.45 GHz-microwave plasma production in the gap of a coaxial pipe under the electron cyclotron resonance. The purpose of this research is to expand the plasma generation conditions into the much lower pressure (0.01–0.1 Torr) and much shorter gap length (several 100 μm). As the first step for this purpose, we have investigated the breakdown and maintenance of plasmas numerically. In the present numerical calculation, we have focused on the influences of applied magnetic field, gas pressure, gap length, applied voltage, and gas species on the breakdown and maintenance of plasmas. [Copyright &y& Elsevier]