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Your search keyword '"Nigam, G. D."' showing total 1 results
Start Over Author "Nigam, G. D." Topic plasma gases
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1. Relationship between plasma parameters and film microstructure in radio frequency magnetron....

Author

Panda, B., Dhar, A., Nigam, G. D., Bhattacharya, D., and Ray, S. K.

Subjects
PLASMA gases, SCIENTIFIC experimentation
Abstract

Examines the relationship between plasma parameters and film microstructure in radio frequency magnetron sputter deposits of arium stontium titanate by using the langmuir probe technique. Details on the variations of plasma ion density; Information on the effects of oxygen addition on ion density; Details on the effects of rf power and discharge pressure on the self-bias of the target.

Published
1998
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