1. Ion-beam sculpting at nanometre length scales
- Author
-
Jiali Li, Derek Stein, Michael J. Aziz, Jene Andrew Golovchenko, Ciaran J. McMullan, and Daniel Branton
- Subjects
Ions ,Physics ,Miniaturization ,Multidisciplinary ,Ion beam ,Microchemistry ,Silicon Compounds ,Membranes, Artificial ,Nanotechnology ,Biosensing Techniques ,DNA ,Ion ,Quantitative Biology::Subcellular Processes ,Nanopore ,Membrane ,Models, Chemical ,Sputtering ,Ion-beam sculpting ,Nanometre ,Transport phenomena ,Filtration - Abstract
Manipulating matter at the nanometre scale is important for many electronic, chemical and biological advances, but present solid-state fabrication methods do not reproducibly achieve dimensional control at the nanometre scale. Here we report a means of fashioning matter at these dimensions that uses low-energy ion beams and reveals surprising atomic transport phenomena that occur in a variety of materials and geometries. The method is implemented in a feedback-controlled sputtering system that provides fine control over ion beam exposure and sample temperature. We call the method "ion-beam sculpting", and apply it to the problem of fabricating a molecular-scale hole, or nanopore, in a thin insulating solid-state membrane. Such pores can serve to localize molecular-scale electrical junctions and switches and function as masks to create other small-scale structures. Nanopores also function as membrane channels in all living systems, where they serve as extremely sensitive electro-mechanical devices that regulate electric potential, ionic flow, and molecular transport across cellular membranes. We show that ion-beam sculpting can be used to fashion an analogous solid-state device: a robust electronic detector consisting of a single nanopore in a Si3N4 membrane, capable of registering single DNA molecules in aqueous solution.
- Published
- 2001
- Full Text
- View/download PDF