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1. The role of ultraviolet radiation during ultralow k films curing: strengthening mechanisms and sacrificial porogen removal

Author

Zenasni, Aziz, Jousseaume, Vincent, Holliger, Philippe, Favennec, Laurent, Gourhant, Olivier, Maury, Patrick, and Gerbaud, Guillaume

Subjects
Porous materials -- Optical properties, Porous materials -- Thermal properties, Silica -- Optical properties, Silica -- Thermal properties, Ultraviolet radiation -- Analysis, Thermal analysis, Physics
Abstract

A study is conducted to explore the impact of ultraviolet assisted thermal curing on the formation of porous ultralow k materials. The structure densification is identified as a key process to enhance the film strength in addition to the crosslinking.

Published
2007

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