1. MEMS for Photonic Integrated Circuits
- Author
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Errando-Herranz, Carlos, Takabayashi, A. Y., Edinger, Pierre, Sattari, H., Gylfason, Kristinn B., and Quack, Niels
- Subjects
Micromechanical devices ,Nonlinear optics ,refractive-index ,photonics ,FOS: Physical sciences ,silicon microring resonator ,Applied Physics (physics.app-ph) ,Tuning ,optical waveguides ,photonic integrated circuits ,tuning ,wavelength ,Hardware_GENERAL ,guide coupler switch ,Annan elektroteknik och elektronik ,optical refraction ,micromechanical devices ,Other Electrical Engineering, Electronic Engineering, Information Engineering ,optical variables control ,silicon photonics ,microdisk resonators ,PIC ,nonlinear optics ,Integrated optics ,Physics - Applied Physics ,Optical waveguides ,MEMS ,Optical variables control ,integrated optics ,microelectromechanical systems ,nanophotonics ,Microelectromechanical systems ,ring-resonator ,Optical refraction ,nanoelectromechanical systems ,wave-guides ,optical mems ,Physics - Optics ,Optics (physics.optics) - Abstract
The field of microelectromechanical systems (MEMS) for photonic integrated circuits (PICs) is reviewed. This field leverages mechanics at the nanometer to micrometer scale to improve existing components and introduce novel functionalities in PICs. This review covers the MEMS actuation principles and the mechanical tuning mechanisms for integrated photonics. The state of the art of MEMS tunable components in PICs is quantitatively reviewed and critically assessed with respect to suitability for large-scale integration in existing PIC technology platforms. MEMS provide a powerful approach to overcome current limitations in PIC technologies and to enable a new design dimension with a wide range of applications. QC 20191029 Morphic
- Published
- 2022
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