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Chemical vapor deposition (CVD) polymerization is a commonly used approach in surface chemistry, providing a substrate‐independent platform for bioactive surface functionalization strategies. This work investigates the Arbuzov reaction of halogenated polymer coatings readily available via CVD polymerization, using poly(4‐chloro‐para‐xylylene) (Parylene C) as a model substance. Postpolymerization modification of these coatings via catalyst‐free and UV‐induced Arbuzov reaction using phosphites results in phosphonate‐functionalized polymers. The combination of infrared reflection‐absorption spectroscopy (IRRAS), X‐ray photoelectron spectroscopy (XPS), and time‐of‐flight secondary ion mass spectrometry (ToF‐SIMS) provides detailed insights into the reaction progress. Time‐dependent studies suggest that the non‐polar phosphites penetrate deep into the CVD films and react with the polymer film. In addition, ToF‐SIMS, scanning electron microscopy (SEM), and atomic force microscopy (AFM) confirm spatial control of the reaction, resulting in localized chemical and topographical surface modification, recognizable by changes in interference color, fluorescence, and wettability. Preliminary 3D fluorescence spectroscopy investigations indicate tunable near‐infrared emission of these polymer films. This work is the first step toward generating multifunctional polymer coatings based on chemically modifiable, CVD polymers with potential applications in biomaterials, sensors, or optoelectronics. [ABSTRACT FROM AUTHOR]