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Start Over Author "Vu, Q. T." Topic oxidation
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1. Thermal oxidation of reactively sputtered amorphous W80N20 films.

Author

Vu, Q. T., Pokela, P. J., Garden, C. L., Kolawa, E., Raud, S., and Nicolet, M-A.

Subjects
*OXIDATION, *TUNGSTEN compounds, *THIN films
Abstract

Presents a study that investigated the oxidation behavior of reactively sputtered amorphous tungsten nitride thin films. Properties of tungsten nitride thin films; Details on the experimental procedures; Discussion on the results of the study.

Published
1990
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