1. Infrared response of vanadium oxide (VOx)/SiNx/reduced graphene oxide (rGO) composite microbolometer
- Author
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Yau-Tang Gau, Hong-Yuan Zeng, Zheng-Yuan Wu, Wen-Jen Lin, Shiang-Feng Tang, and Tzu-Chiang Chen
- Subjects
Amorphous silicon ,Materials science ,Infrared ,Composite number ,Oxide ,02 engineering and technology ,010402 general chemistry ,01 natural sciences ,Vanadium oxide ,law.invention ,chemistry.chemical_compound ,Responsivity ,law ,Electrical and Electronic Engineering ,Safety, Risk, Reliability and Quality ,Graphene ,business.industry ,Microbolometer ,021001 nanoscience & nanotechnology ,Condensed Matter Physics ,Atomic and Molecular Physics, and Optics ,0104 chemical sciences ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,chemistry ,Optoelectronics ,0210 nano-technology ,business - Abstract
Much attention has been paid to the photoresponse of vanaduim oxide (VOx) and amorphous silicon based microbolometer for long-wavelength infrared detection under un-cooled operation condition in recent decades. However, the outstanding physical and chemical properties of graphene and reduced graphene oxide (rGO) stimulate their potential for use in light-sensitive applications. Much less attention has been paid to investigate the performance on long-wavelength infrared detection of microbolometer using reduced graphene oxide/SiNx/vanadium oxide composite films deposited on under room temperature operation. In the research, we have proposed the novel microbolometer based on VOx/SiNx/rGO composite films replace the as-deposited VOx based microbolometer. It is noted that such extraordinary properties (high responsivity: 18,130 V/W and low NETD: 43.32 mK) of the VOx/SiNx/rGO composite presented here encourage us to contemplate on this protocol for next generation optoelectronic device engineering for infrared detection.
- Published
- 2018
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