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In an effort to leverage uncooled microbolometer technology, testing of bolometer performance in various nonimaging applications has been performed. One of these applications makes use of an uncooled microbolometer array as the sensing element for a laser beam analyzer. Results of the characterization of cw CO2 laser beams with this analyzer are given. A comparison with the results obtained with a commercial laser beam analyzer is made. Various advantages specific to microbolometer arrays for this application are identified. A second application makes use of microbolometers for absolute temperature measurements. The experimental method and results are described. The technique's limitations and possible implementations are discussed. Finally, the third application evaluated is related to the rapidly expanding field of biometry. It consists of using a modified microbolometer array for fingerprint sensing. The basic approach allowing the use of microbolometers for such an application is discussed. The results of a proof-of-principle experiment are described. Globally, the described work illustrates the fact that microbolometer array fabrication technology can be exploited for many important applications other than IR imaging.

An uncooled IR camera making use of a 128 X 128 pixel bolometric FPA is presented. The reconfigurable bolometric focal plane array consist of 50 micrometer X 50 micrometer pixels and simple on-chip CMOS readout electronics which can be operated in random access, independent row and column clocking, and self-scanning modes. Depending on the selected pixel format and frame rate, the FPA's NETD varies from 0.52 degrees Celsius down to 0.10 degrees Celsius. The modular IR camera is software configured and provides RS170A analog video and 12-bit TTL format digital outputs.

A novel type of light modulating micromirror device has been designed and fabricated. A unique hinge structure provides the device with the potential for modulating both the phase and amplitude of light signals, while its high thermal conductivity makes the device amenable to high power laser applications. An extremely high fill factor can be attained since the hinges lie entirely beneath the mirror surface. This hidden hinge structure is comprised of a single level and therefore involves a simple fabrication process. Micromirrors with dimensions ranging from 100 micrometers X 100 micrometers to 300 micrometers X 300 micrometers with maximum deflection angles from 2 degree(s) to 4 degree(s) were fabricated. The devices were characterized in terms of the reflecting surface optical quality, the operational modes attainable, the critical voltages (as low as 15 volts), and the response time (as short as 125 microsecond(s) ).