1. Fabry–Perot interferometric calibration of van der Waals material-based nanomechanical resonators
- Author
-
Joshoua Condicion Esmenda, Chii-Dong Chen, Teik-Hui Lee, Sergey Kafanov, Chi-Yuan Yang, Kung-Hsuan Lin, Myrron Albert Callera Aguila, Yuri Pashkin, Jyh-Yang Wang, and Kuei-Shu Chang-Liao
- Subjects
Materials science ,business.industry ,General Engineering ,Bioengineering ,General Chemistry ,Atomic and Molecular Physics, and Optics ,Resonator ,Interferometry ,symbols.namesake ,Optics ,Calibration ,symbols ,General Materials Science ,van der Waals force ,business ,Fabry–Pérot interferometer - Abstract
One of the challenges in integrating nanomechanical resonators made from van der Waals materials in optoelectromechanical technologies is characterizing their dynamic properties from vibrational displacement. Multiple calibration schemes using optical interferometry have tackled this challenge. However, these techniques are limited only to optically thin resonators with an optimal vacuum gap height and substrate for interferometric detection. Here, we address this limitation by implementing a modeling-based approach
- Published
- 2022