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We have developed a next-generation scanning x-ray microscope RASMI (RApid Scanning Microscopy Instrument) for high-throughput tomographic imaging. RASMI is installed at the hard x-ray nanoprobe beamline at NSLS-II and is capable of manipulating 1D multilayer Laue lenses (MLLs) and 2D optics (both zone plates and monolithically assembled 2D MLLs). The sample scanning stage utilizes line-focusing interferometry as an encoder while performing fly-scanning data acquisition. The system can be configured for both position- and time-triggering modes during fly-scanning. The microscope demonstrated a detector-limited data acquisition rate of 1.25 kHz during ptychography measurements. The initial x-ray results yielded a sample-limited resolution of ∼6 nm in 2D. RASMI can be adopted for in-vacuum applications and is a foundation for the next-generation scanning microscopy systems to be developed and commissioned at NSLS-II. [ABSTRACT FROM AUTHOR]

B Fabrication of MLL optics. b The MLL optics were fabricated via magnetron sputtering deposition on a silicon substrate and further sectioned by reactive ion etching, followed by focused ion beam (FIB) milling. Discussion and Conclusion The developed monolithic MEMS-based 2D multilayer Laue lens nanofocusing optics significantly simplify the MLLs alignment process and, meanwhile, guarantee the angular and lateral alignment of assembled 2D optics. Keywords: X-ray microscopy; multilayer Laue lenses; optics; MEMS; microfabrication EN X-ray microscopy multilayer Laue lenses optics MEMS microfabrication 28 33 6 11/29/22 20221101 NES 221101 Introduction X-ray microscopy is a powerful characterization tool applied in many scientific fields, such as materials science, environmental science, biology, and energy research [[1]-[4]]. [Extracted from the article]

Multilayer Laue lenses (MLLs) have demonstrated great capabilities for efficiently focusing hard X-rays down to the nanometer scale. Optimized use of MLLs in a scanning X-ray microscope requires careful consideration of a number of practical parameters other than resolution and efficiency in order to optimize the microscope's performance and scientific throughput. Here, relationships among the apodization effect owing to the presence of a beamstop, the monochromaticity requirement and the allowable working distance are discussed, as well as their impacts on the performance of the optics. Based on these discussions, optimal MLL schemes aiming at 10 nm resolution for a scanning X-ray microscope for the Hard X-ray Nanoprobe (HXN) beamline at National Synchrotron Light Source II are presented. [ABSTRACT FROM AUTHOR]

We report on a developed micromachined silicon platform for the precise assembly of 2D multilayer Laue lenses (MLLs) for high-resolution X-ray microscopy. The platform is 10 × 10 mm2 and is fabricated on ~500 µm thick silicon wafers through multiple steps of photolithography and deep reactive-ion etching. The platform accommodates two linear MLLs in a pre-defined configuration with precise angular and lateral position control. In this work, we discuss the design and microfabrication of the platform, and characterization regarding MLLs assembly, position control, repeatability, and stability. The results demonstrate that a micromachined platform can be used for the assembly of a variety of MLLs with different dimensions and optical parameters. The angular misalignment of 2D MLLs is well controlled in the range of the designed accuracy, down to a few millidegrees. The separation distance between MLLs is adjustable from hundreds to more than one thousand micrometers. The use of the developed platform greatly simplifies the alignment procedure of the MLL optics and reduces the complexity of the X-ray microscope. It is a significant step forward for the development of monolithic 2D MLL nanofocusing optics for high-resolution X-ray microscopy. [ABSTRACT FROM AUTHOR]

• A machine-learning-based method is developed to automatically measure the small angle between multiple planar surfaces in an interferometer image. • This easy-to-use and accurate method significantly simplifies the angle measurement procedure and is compatible with widely used white light interferometers. • The new method is demonstrated for a quick and precise angle measurement for the alignment of 2D multilayer Laue lenses for developing high-resolution x-ray microscopy. We report a new machine-learning-based approach to automatically measure the small angle between multiple planar surfaces characterized by white light interferometers. By applying an unsupervised clustering algorithm, DBSCAN (Density-Based Spatial Clustering of Applications with Noise), the multiple surfaces in an interferometer image are automatically identified as distinct surfaces. The angles between every two surfaces are then calculated through the surface fitting. This method can be applied to multiple surfaces regardless of their shapes and locations and significantly simplifies the angle measurement procedure. Using the developed method, we have demonstrated a quick and precise angle measurement for the alignment of 2D Multilayer Laue Lenses (MLLs) for the development of high-resolution x-ray microscopy. This automatic, accurate, and robust small-angle measurement method is compatible with widely used white light interferometers and can be further applied to other metrology applications of interferometer results. [ABSTRACT FROM AUTHOR]

Abstract: We report the basic beamline design and current status of a new full-field X-ray imaging facility at Sector 32 of the Advanced Photon Source. The beamline consists of an existing hutch at 40m and a new experiment enclosure at 77m from the source, with both monochromatic and white-beam undulator X-ray capabilities. Experimental programs being planned for the beamline include high-speed time-resolved imaging, phase-contrast and coherent imaging, diffraction-enhanced imaging, ultra-small-angle scattering imaging, and phase- and absorption-contrast transmission X-ray microscopy. [Copyright &y& Elsevier]