Search

Specular-mode spectroscopic ellipsometry is applied to analyze the optical response of gratings fabricated on a thick transparent plate substrate. The principles of the optical response of the gratings are described by employing incoherent contributions due to backreflections in the finite transparent substrate medium. A special function identifies a “diminution effect” caused by deflecting the secondary contributions from the primary beam axis. Two different methods are used to measure the ellipsometric response, a liquid solution method with the backreflections eliminated and a method including the incoherent backreflections. The grating parameters deduced by fitting from the measurement using the first method are applied to simulate the ellipsometric response using the second method. The spectral dependencies yielded by both methods are compared with remarkable agreement between the simulations and the measurements, which suggests the high usability of the backreflection method in the metrological characterization of gratings made on transparent plates. [ABSTRACT FROM AUTHOR]

Abstract: In this paper the results concerning the optical characterization of the PZT film are presented. The multi-sample modification of the optical method based on combining variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry is used to obtain the spectral dependences of the optical constants of this film within the spectral region 190–1000 nm. Within the near-UV region the sharp features of the spectral dependences of the optical constants are found. These features are explained by the existence of the narrow bands of the 4d and 3d valence electrons of the transition metals Zr and Ti. Within the optical characterization of the PZT film the defects consisting of boundary roughness and refractive index profile are respected. [Copyright &y& Elsevier]