1. Charge Generation by Secondary Particles From Nuclear Reactions in BEOL Materials.
- Author
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Dodds, N. A., Reed, R. A., Mendenhall, M. H., Weller, R. A., Clemens, M. A., Dodd, P. E., Shaneyfelt, M. R., Vizkelethy, G., Schwank, J. R., Ferlet-Cavrois, V., Adams Jr., J. H., Schrimpf, R. D., and King, M. P.
- Subjects
NUCLEAR reactions ,LINEAR energy transfer ,MONTE Carlo method ,SILICON-on-insulator technology ,IONIZATION of gases ,HEAVY ions - Abstract
Direct charge collection measurements are presented, which prove that the presence of tungsten near sensitive volumes leads to extreme charge collection events through nuclear reactions. We demonstrate that, for a fixed incident particle linear energy transfer (LET), increasing particle energy beyond a certain point causes a decrease in nuclear reaction-induced charge collection. This suggests that a worst-case energy exists for single-event effect (SEE) susceptibility, which depends on the technology, device layout, and the incident ions' fixed LET value. A Monte Carlo approach for identifying the worst-case energy is applied to certam bulk-Si and silicon-on-insulator (SOI) technologies. Simulation results suggest that the decrease in charge collection beyond the worst-case energy occurs because the secondary particles produced from the high-energy nuclear reactions have less mass and higher energy and are therefore less ionizing than those produced by lower-energy reactions. [ABSTRACT FROM AUTHOR]
- Published
- 2009
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